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Sensors 2016, 16(11), 1728;

Design of the MEMS Piezoresistive Electronic Heart Sound Sensor

1,2,†,* , 1,2,†
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 23 August 2016 / Revised: 3 October 2016 / Accepted: 11 October 2016 / Published: 7 November 2016
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
Full-Text   |   PDF [7324 KB, uploaded 7 November 2016]   |  


This paper proposes the electronic heart sound sensor, based on the piezoresistive principle and MEMS (Micro-Electro-Mechanical System) technology. Firstly, according to the characteristics of heart sound detection, the double-beam-block microstructure has been proposed, and the theoretical analysis and finite element method (FEM) simulation have been carried out. Combined with the natural frequency response of the heart sound (20~600 Hz), its structure sizes have been determined. Secondly, the processing technology of the microstructure with the stress concentration grooves has been developed. The material and sizes of the package have been determined by the three-layer medium transmission principle. Lastly, the MEMS piezoresistive electronic heart sound sensor has been tested compared with the 3200-type electronic stethoscope from 3M (São Paulo, MN, USA). The test results show that the heart sound waveform tested by the MEMS electronic heart sound sensor are almost the same as that tested by the 3200-type electronic stethoscope. Moreover, its signal-to-noise ratio is significantly higher. Compared with the traditional stethoscope, the MEMS heart sound sensor can provide the first and second heart sounds containing more abundant information about the lesion. Compared with the 3200-type electronic stethoscope from 3M, it has better performance and lower cost. View Full-Text
Keywords: MEMS; heart sound sensor; stress concentration; signal-to-noise ratio MEMS; heart sound sensor; stress concentration; signal-to-noise ratio

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Zhang, G.; Liu, M.; Guo, N.; Zhang, W. Design of the MEMS Piezoresistive Electronic Heart Sound Sensor. Sensors 2016, 16, 1728.

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