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Journal: Sensors, 2015
Volume: 15
Number: 17036
Article:
Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction
Authors:
by
Eloi Marigó, Marc Sansa, Francesc Pérez-Murano, Arantxa Uranga and Núria Barniol
Link:
https://www.mdpi.com/1424-8220/15/7/17036
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