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Journal: Sensors, 2015
Volume: 15
Number: 7349
Article:
A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process
Authors:
by
Adel Merdassi, Peng Yang and Vamsy P. Chodavarapu
Link:
https://www.mdpi.com/1424-8220/15/4/7349
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