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Measurement of Phase Difference for Micromachined Gyros Driven by Rotating Aircraft

School of Electronic Engineering, Beijing University of Posts and Telecommunications, Beijing 100876, China
Sensing Technique Research Center, Beijing Information Science and Technology University, Beijing 100101, China
Author to whom correspondence should be addressed.
Sensors 2013, 13(8), 11051-11068;
Received: 27 June 2013 / Revised: 15 July 2013 / Accepted: 3 August 2013 / Published: 21 August 2013
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2013)
PDF [993 KB, uploaded 21 June 2014]


This paper presents an approach for realizing a phase difference measurement of a new gyro. A silicon micromachined gyro was mounted on rotating aircraft for aircraft attitude control. Aircraft spin drives the silicon pendulum of a gyro rotating at a high speed so that it can sense the transverse angular velocity of the rotating aircraft based on the gyroscopic precession principle when the aircraft has transverse rotation. In applications of the rotating aircraft single channel control system, such as damping in the attitude stabilization loop, the gyro signal must be kept in sync with the control signal. Therefore, the phase difference between both signals needs to be measured accurately. Considering that phase difference is mainly produced by both the micromachined part and the signal conditioning circuit, a mathematical model has been established and analyzed to determine the gyro’s phase frequency characteristics. On the basis of theoretical analysis, a dynamic simulation has been done for a case where the spin frequency is 15 Hz. Experimental results with the proposed measurement method applied to a silicon micromachined gyro driven by a rotating aircraft demonstrate that it is effective in practical applications. Measured curve and numerical analysis of phase frequency characteristic are in accordance, and the error between measurement and simulation is only 5.3%. View Full-Text
Keywords: micromachined gyro; silicon pendulum; phase difference; rotating aircraft micromachined gyro; silicon pendulum; phase difference; rotating aircraft
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Zhang, Z.; Zhang, F.; Zhang, W. Measurement of Phase Difference for Micromachined Gyros Driven by Rotating Aircraft. Sensors 2013, 13, 11051-11068.

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