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Principle Research on a Single Mass Piezoelectric Six-Degrees-of-Freedom Accelerometer

1,2,*, 1,2, 1,2 and 1,2
Key Laboratory of Optoelectronics Technology and Systems Ministry of Education, Chongqing University, Chongqing 400044, China
College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Author to whom correspondence should be addressed.
Sensors 2013, 13(8), 10844-10855;
Received: 24 June 2013 / Revised: 12 August 2013 / Accepted: 14 August 2013 / Published: 16 August 2013
(This article belongs to the Section Physical Sensors)
PDF [538 KB, uploaded 21 June 2014]


A signal mass piezoelectric six-degrees-of-freedom (six-DOF) accelerometer is put forward in response to the need for health monitoring of the dynamic vibration characteristics of high grade digitally controlled machine tools. The operating principle of the piezoelectric six-degrees-of-freedom accelerometer is analyzed, and its structure model is constructed. The numerical simulation model (finite element model) of the six axis accelerometer is established. Piezoelectric quartz is chosen for the acceleration sensing element and conversion element, and its static sensitivity, static coupling interference and dynamic natural frequency, dynamic cross coupling are analyzed by ANSYS software. Research results show that the piezoelectric six-DOF accelerometer has advantages of simple and rational structure, correct sensing principle and mathematic model, good linearity, high rigidity, and theoretical natural frequency is more than 25 kHz, no nonlinear cross coupling and no complex decoupling work. View Full-Text
Keywords: six-DOF accelerometer; piezoelectric sensor; finite element six-DOF accelerometer; piezoelectric sensor; finite element

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This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Liu, J.; Li, M.; Qin, L.; Liu, J. Principle Research on a Single Mass Piezoelectric Six-Degrees-of-Freedom Accelerometer. Sensors 2013, 13, 10844-10855.

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