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Open AccessArticle

High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors

Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-Ku, Incheon 402-751, Korea
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Sensors 2013, 13(4), 4088-4101; https://doi.org/10.3390/s130404088
Received: 1 February 2013 / Revised: 1 March 2013 / Accepted: 22 March 2013 / Published: 26 March 2013
(This article belongs to the Special Issue Nanomechanical Sensors)
This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The cantilever step length and piezoresistor length is varied along with the operating voltage to characterise the surface stress sensitivity and thermal drifting sensitivity of the cantilevers when used as immunosensor. The numerical analysis is performed using ANSYS Multiphysics. Results show the surface stress sensitivity and the S/N ratio of the slotted step cantilevers is improved by more than 32% and 22%, respectively, over its monolithic counterparts. View Full-Text
Keywords: step microcantilever; self-heating; biosensors; piezoresistivity; thermal drifting; bimetallic effect step microcantilever; self-heating; biosensors; piezoresistivity; thermal drifting; bimetallic effect
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MDPI and ACS Style

Ansari, M.Z.; Cho, C. High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors. Sensors 2013, 13, 4088-4101.

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