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Sensors 2011, 11(8), 7644-7655;

Suppression of Air Refractive Index Variations in High-Resolution Interferometry

Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic
Author to whom correspondence should be addressed.
Received: 16 June 2011 / Revised: 23 July 2011 / Accepted: 24 July 2011 / Published: 2 August 2011
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [253 KB, uploaded 21 June 2014]


The influence of the refractive index of air has proven to be a major problem on the road to improvement of the uncertainty in interferometric displacement measurements. We propose an approach with two counter-measuring interferometers acting as a combination of tracking refractometer and a displacement interferometer referencing the wavelength of the laser source to a mechanical standard made of a material with ultra-low thermal expansion. This technique combines length measurement within a specified range with measurement of the refractive index fluctuations in one axis. Errors caused by different position of the interferometer laser beam and air sensors are thus eliminated. The method has been experimentally tested in comparison with the indirect measurement of the refractive index of air in a thermal controlled environment. Over a 1 K temperature range an agreement on the level of 5 × 10−8 has been achieved. View Full-Text
Keywords: refractometry; nanopositioning; interferometry; nanometrology refractometry; nanopositioning; interferometry; nanometrology
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Lazar, J.; Číp, O.; Čížek, M.; Hrabina, J.; Buchta, Z. Suppression of Air Refractive Index Variations in High-Resolution Interferometry. Sensors 2011, 11, 7644-7655.

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