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Journal: Sensors, 2011
Volume: 11
Number: 11206

Article: Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer
Authors: by Feng Cui, Wu Liu, Wenyuan Chen, Weiping Zhang and Xiaosheng Wu
Link: https://www.mdpi.com/1424-8220/11/12/11206

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