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Open AccessArticle

A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip

Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui 251, Taiwan
Author to whom correspondence should be addressed.
Sensors 2011, 11(12), 11112-11121;
Received: 13 October 2011 / Revised: 22 November 2011 / Accepted: 23 November 2011 / Published: 28 November 2011
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering 2011)
A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 mm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The ammonia sensor requires a post-process to etch the sacrificial layer, and to coat the sensitive film on the polysilicon electrodes. The sensitive film that is prepared by a hydrothermal method is made of zinc oxide. The sensor resistance changes when the sensitive film adsorbs or desorbs ammonia gas. The readout circuit is used to convert the sensor resistance into the voltage output. Experiments show that the ammonia sensor has a sensitivity of about 1.5 mV/ppm at room temperature. View Full-Text
Keywords: ammonia microsensor; zinc oxide film; nanorod; readout circuit ammonia microsensor; zinc oxide film; nanorod; readout circuit
MDPI and ACS Style

Yang, M.-Z.; Dai, C.-L.; Wu, C.-C. A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip. Sensors 2011, 11, 11112-11121.

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