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Sensors 2011, 11(11), 10615-10623;

All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing

DTU Nanotech, Technical University of Denmark, Øersteds Plads, Building 345B, DK-2800 Kgs. Lyngby, Denmark
CINF Center for Individual Nanoparticle Functionality, Technical University of Denmark, Building 345B, DK-2800 Kgs. Lyngby, Denmark
Author to whom correspondence should be addressed.
Received: 26 September 2011 / Revised: 27 October 2011 / Accepted: 4 November 2011 / Published: 8 November 2011
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [326 KB, uploaded 21 June 2014]


We present the design, fabrication and characterization of a new all-optical frequency modulated pressure sensor. Using the tangential strain in a circular membrane, a waveguide with an integrated nanoscale Bragg grating is strained longitudinally proportional to the applied pressure causing a shift in the Bragg wavelength. The simple and robust design combined with the small chip area of 1 × 1.8 mm2 makes the sensor ideally suited for remote and distributed sensing in harsh environments and where miniaturized sensors are required. The sensor is designed for high pressure applications up to 350 bar and with a sensitivity of 4.8 pm/bar (i.e., 350 ×105 Pa and 4.8 × 10−5 pm/Pa, respectively). View Full-Text
Keywords: optical sensor; MEMS; Bragg grating optical sensor; MEMS; Bragg grating
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Reck, K.; Thomsen, E.V.; Hansen, O. All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing. Sensors 2011, 11, 10615-10623.

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