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Search Results (3)

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Keywords = readout for capacitive micromachined transducer

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6 pages, 1555 KB  
Proceeding Paper
A New Readout Method for a High Sensitivity Capacitance Sensor Based on Weakly Coupled Resonators
by Vinayak Pachkawade
Eng. Proc. 2020, 2(1), 86; https://doi.org/10.3390/ecsa-7-08230 - 14 Nov 2020
Cited by 2 | Viewed by 2026
Abstract
This paper proposes a new readout method for a sensor to detect minute variations in the capacitance. A sensor is based on the weakly coupled electrical resonators that use an amplitude ratio (AR) as an output signal. A new readout scheme with a [...] Read more.
This paper proposes a new readout method for a sensor to detect minute variations in the capacitance. A sensor is based on the weakly coupled electrical resonators that use an amplitude ratio (AR) as an output signal. A new readout scheme with a relatively higher output sensitivity is proposed to measure the relative changes in the input capacitor. A mathematical model is derived to express the readout output as a function of change in the capacitance. To validate the theoretical model, a system is modelled and designed using an industry-standard electronic circuit design environment. SPICE simulation results are presented for a wide range of design parameters, such as varying coupling factors between the two electrical resonators. Sensitivity comparison between the existing and the proposed AR readout is presented to show the effectiveness of the method of detection proposed in this work. Full article
(This article belongs to the Proceedings of 7th International Electronic Conference on Sensors and Applications)
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17 pages, 3297 KB  
Review
Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT
by Haleh Nazemi, Jenitha Antony Balasingam, Siddharth Swaminathan, Kenson Ambrose, Muhammad Umair Nathani, Tara Ahmadi, Yameema Babu Lopez and Arezoo Emadi
Sensors 2020, 20(7), 2010; https://doi.org/10.3390/s20072010 - 3 Apr 2020
Cited by 54 | Viewed by 11224
Abstract
Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass [...] Read more.
Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass sensors based on capacitive and piezoelectric transducer configurations for use in low concentration level gas detection in a complex environment. These micromachined sensors operate based on a shift in their center resonant frequencies. This shift is caused by a change in the sensor’s effective mass when exposed to the target gas molecules, which is then correlated to the gas concentration level. In this work, capacitive and piezoelectric-based micromachined sensors are investigated and their principle of operation, device structures and configurations, critical design parameters and their candidate fabrication techniques are discussed in detail. Full article
(This article belongs to the Section Chemical Sensors)
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11 pages, 3079 KB  
Article
A Capacitive Micromachined Ultrasonic Transducer-Based Resonant Sensor Array for Portable Volatile Organic Compound Detection with Wireless Systems
by Inug Yoon, Gayoung Eom, Sungwoo Lee, Bo Kyeong Kim, Sang Kyung Kim and Hyunjoo J. Lee
Sensors 2019, 19(6), 1401; https://doi.org/10.3390/s19061401 - 21 Mar 2019
Cited by 27 | Viewed by 8651
Abstract
The development of portable volatile organic compound (VOC) sensors is essential for home healthcare and workplace safety because VOCs are environmental pollutants that may critically affect human health. Here, we report a compact and portable sensor platform based on a capacitive micromachined ultrasonic [...] Read more.
The development of portable volatile organic compound (VOC) sensors is essential for home healthcare and workplace safety because VOCs are environmental pollutants that may critically affect human health. Here, we report a compact and portable sensor platform based on a capacitive micromachined ultrasonic transducer (CMUT) array offering multiplex detection of various VOCs (toluene, acetone, ethanol, and methanol) using a single read-out system. Three CMUT resonant devices were functionalized with three different layers: (1) phenyl-selective peptide, (2) colloids of single-walled nanotubes and peptide, and (3) poly(styrene-co-allyl alcohol). As each device exhibited different sensitivities to the four VOCs, we performed principal component analysis to achieve selective detection of all four gases. For the simultaneous detection of VOCs using CMUT sensors, the changes in the resonant frequencies of three devices were monitored in real time, but using only a single oscillator through an electrically controlled relay to achieve compactness. In addition, by devising a wireless system, measurement results were transmitted to a smartphone to monitor the concentration of VOCs. We used multiple sensors to obtain a larger number of fingerprints for pattern recognition to enhance selectivity but interfaced these sensors with a single read-out circuit to minimize the footprint of the overall system. The compact CMUT-based sensor array based on a multiplex detection scheme is a promising sensor platform for portable VOC monitoring. Full article
(This article belongs to the Collection Gas Sensors)
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