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Keywords = piezo-inertia actuator

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16 pages, 6358 KB  
Article
A Compact Piezo-Inertia Actuator Utilizing the Double-Rocker Flexure Hinge Mechanism
by Pingping Sun, Chenglong Lei, Chuannan Ge, Yunjun Guo and Xingxing Zhu
Micromachines 2023, 14(6), 1117; https://doi.org/10.3390/mi14061117 - 26 May 2023
Cited by 6 | Viewed by 2901
Abstract
With a simple structure and control method, the piezo-inertia actuator is a preferred embodiment in the field of microprecision industry. However, most of the previously reported actuators are unable to achieve a high speed, high resolution, and low deviation between positive and reverse [...] Read more.
With a simple structure and control method, the piezo-inertia actuator is a preferred embodiment in the field of microprecision industry. However, most of the previously reported actuators are unable to achieve a high speed, high resolution, and low deviation between positive and reverse velocities at the same time. To achieve a high speed, high resolution, and low deviation, in this paper we present a compact piezo-inertia actuator with a double rocker-type flexure hinge mechanism. The structure and operating principle are discussed in detail. To study the load capacity, voltage characteristics, and frequency characteristics of the actuator, we made a prototype and conducted a series of experiment. The results indicate good linearity in both positive and negative output displacements. The maximum positive and negative velocities are about 10.63 mm/s and 10.12 mm/s, respectively, and the corresponding speed deviation is 4.9%. The positive and negative positioning resolutions are 42.5 nm and 52.5 nm, respectively. In addition, the maximum output force is 220 g. These results show that the designed actuator has a minor speed deviation and good output characteristics. Full article
(This article belongs to the Special Issue Acoustic Transducers and Their Applications)
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13 pages, 3722 KB  
Article
A Novel Piezo Inertia Actuator Utilizing the Transverse Motion of Two Parallel Leaf-Springs
by Pingping Sun, Zhike Xu, Long Jin and Xingxing Zhu
Micromachines 2023, 14(5), 954; https://doi.org/10.3390/mi14050954 - 27 Apr 2023
Cited by 4 | Viewed by 3514
Abstract
A novel linear piezo inertia actuator based on the transverse motion principle is proposed. Under the action of the transverse motion of two parallel leaf-springs, the designed piezo inertia actuator can achieve great stroke movements at a fairly high speed. The presented actuator [...] Read more.
A novel linear piezo inertia actuator based on the transverse motion principle is proposed. Under the action of the transverse motion of two parallel leaf-springs, the designed piezo inertia actuator can achieve great stroke movements at a fairly high speed. The presented actuator includes a rectangle flexure hinge mechanism (RFHM) with two parallel leaf-springs, a piezo-stack, a base, and a stage. The mechanism construction and operating principle of the piezo inertia actuator are discussed, respectively. To obtain the proper geometry of the RFHM, we have used a commercial finite element program COMSOL. To investigate the output characteristics of the actuator, the relevant experiment tests including loading capacity, voltage characteristic, and frequency characteristic are adopted. The maximum movement speed and the minimum step size are 27.077 mm/s and 32.5 nm, respectively, confirming that the RFHM with two parallel leaf-springs can be used to design a piezo inertia actuator with a high speed and accuracy. Therefore, this actuator can be used in applications with fast positioning and high accuracy. Full article
(This article belongs to the Special Issue Piezoelectric Materials, Devices and Systems)
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18 pages, 6296 KB  
Review
Piezoelectric Motors, an Overview
by Karl Spanner and Burhanettin Koc
Actuators 2016, 5(1), 6; https://doi.org/10.3390/act5010006 - 26 Feb 2016
Cited by 142 | Viewed by 23041
Abstract
Piezoelectric motors are used in many industrial and commercial applications. Various piezoelectric motors are available in the market. All of the piezoelectric motors use the inverse piezoelectric effect, where microscopically small oscillatory motions are converted into continuous or stepping rotary or linear motions. [...] Read more.
Piezoelectric motors are used in many industrial and commercial applications. Various piezoelectric motors are available in the market. All of the piezoelectric motors use the inverse piezoelectric effect, where microscopically small oscillatory motions are converted into continuous or stepping rotary or linear motions. Methods of obtaining long moving distance have various drive and functional principles that make these motors categorized into three groups: resonance-drive (piezoelectric ultrasonic motors), inertia-drive, and piezo-walk-drive. In this review, a comprehensive summary of piezoelectric motors, with their classification from initial idea to recent progress, is presented. This review also includes some of the industrial and commercial applications of piezoelectric motors that are presently available in the market as actuators. Full article
(This article belongs to the Special Issue Piezoelectric Actuators)
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