Search Results (37)

This work presents the theoretical design and finite element modeling of high-sensitivity microcantilevers for biosensing applications, integrating piezoelectric actuation with novel ultrananocrystalline diamond (UNCD) structures. Microcantilevers were designed based on projections to grow a multilayer metal/AlN/metal/UNCD stack on silicon substrates, optimized to detect adsorption of biomolecules on the surface of exposed UNCD microcantilevers at the picogram scale. A central design criterion was to match the microcantilever’s eigenfrequency with the resonant frequency of the AlN-based piezoelectric actuator, enabling efficient dynamic excitation. The beam length was tuned to ensure a ≥2 kHz resonant frequency shift upon adsorption of 1 pg of mass distributed on the exposed surface of a UNCD-based microcantilever. Subsequently, a Gaussian distribution mass function with a variance of 5 µm was implemented to evaluate the resonant frequency shift upon mass addition at a certain point on the microcantilever where a variation from 600 Hz to 100 Hz was observed when the mass distribution center was located at the tip of the microcantilever and the piezoelectric borderline, respectively. Both frequency and time domain analyses were performed to predict the resonance behavior, oscillation amplitude, and quality factor. To ensure the reliability of the simulations, the model was first validated using experimental results reported in the literature for an AlN/nanocrystalline diamond (NCD) microcantilever. The results confirmed that the AlN/UNCD architecture exhibits higher resonant frequencies and enhanced sensitivity compared to equivalent AlN/Si structures. The findings demonstrate that using a UNCD-based microcantilever not only improves biocompatibility but also significantly enhances the mechanical performance of the biosensor, offering a robust foundation for the development of next-generation MEMS-based biochemical detection platforms. The research reported here introduces a novel design methodology that integrates piezoelectric actuation with UNCD microcantilevers through eigenfrequency matching, enabling efficient picogram-scale mass detection. Unlike previous approaches, it combines actuator and cantilever optimization within a unified finite element framework, validated against experimental data published in the literature for similar piezo-actuated sensors using materials with inferior biocompatibility compared with the novel UNCD. The dual-domain simulation strategy offers accurate prediction of key performance metrics, establishing a robust and scalable path for next-generation MEMS biosensors. Full article

The mechanisms of material removal and structural transformation under laser radiation differ significantly between single-crystal diamond (SCD) and nanocrystalline diamond (NCD). This study employs atomic simulations to investigate the material removal mechanisms and structural transformation behaviors of SCD and NCD when subjected to laser irradiation. We analyze the effects of temperature and stress changes induced by laser radiation on structural transformations, revealing the driving mechanism behind graphitization transitions. Specifically, the thermal–mechanical coupling effect induced by lasers leads to graphitization in SCD, while in NCD, due to the stress concentration effects at the grain boundaries, graphitization preferentially occurs at these boundaries. The material removal processes for both SCD and NCD are attributed to thermal stress concentrations in the regions where the laser interacts with the diamond surface. This investigation provides a theoretical foundation for a more profound understanding of the behavior of diamond materials during laser irradiation. Full article

In this work, AlGaN/GaN high-electron-mobility transistors (HEMTs) with a nanocrystalline diamond (NCD)/SiN_x trench dual-passivated (TDP) structure were promoted, which demonstrated superior performance with a higher saturation output current (I_dss) of 1.266 A/mm, a higher maximum transconductance (G_mmax) of 0.329 S/mm, and a lower resistance (R_on) of 2.64 Ω·mm. Thermal simulations revealed a peak junction temperature of 386.36 K for TDP devices under V_ds/V_gs = 30 V/0 V, representing 13.7% and 4.5% reductions versus SiN_x single-passivated (SP, 447.59 K) and dual-passivated (DP, 404.58 K) devices, respectively. The results suggested that compared to conventional SP and DP devices, TDP devices can effectively suppress the self-heating effect, thereby improving output characteristics while maintaining superior RF small-signal characteristics. Moreover, the results of numerical simulations indicated that the enhanced electrothermal performance of TDP devices was predominantly attributed to the mitigation of temperature-induced degradation in electron mobility and drift velocity, thereby preserving their high power and high frequency capabilities. These results highlighted the significant potential of TDP devices to improve the performance of GaN HEMTs in high-power and high-frequency applications. Full article

Nanocrystalline diamond (NCD) is regarded as a highly promising composite engineering material owing to its superior mechanical properties. Surface texturing significantly enhances the surface performance of NCD. Given the unique inherent combination of hardness and brittleness in NCD, laser ablation emerges as a critical method for fabricating surface microstructures. However, the research on laser-induced surface texturing of NCD remains limited. This study experimentally investigated the characteristics of nanosecond laser-ablation-induced graphitization in NCD and provided an in-depth analysis of the laser ablation mechanism, aiming to guide the optimization of NCD surface microtexture manufacturing. Specifically, we conducted systematic nanosecond pulse laser ablation experiments on NCD samples and utilized Raman spectroscopy to qualitatively characterize the graphitization within microgrooves and across the entire ablated surface. The effects of the laser scanning speed, power, defocus level, and scanning interval on the graphitization extent and morphological characteristics were systematically investigated, identifying the single-factor optimal parameter set for maximizing graphitization. Through single-factor experimental analysis, the findings of this study provide foundational data for subsequent multivariate-coupled optimization and offer theoretical support for enhancing the surface properties of NCD through microtexturing via laser ablation. Full article

Thermal accumulation under high output power densities is one of the most significant challenges for GaN power devices. Diamond, with its ultra-high thermal conductivity, offers great potential for improving heat dissipation in high-power GaN devices. In this study, nanocrystalline diamond (NCD) passivated high-electron mobility transistors (HEMTs) based on AlGaN/GaN-on-Si heterostructures were fabricated with a gate length of 2 μm. The NCD film has a thickness of 250–383 nm and a uniform morphology with a grain size of mostly ~240 nm. Compared to the devices without NCD passivation, those devices with the NCD passivation layer show an increase in current density from 447 mA/mm to 555 mA/mm, a reduction in on-resistance from 20 Ω·mm to 13 Ω·mm, and a noticeable suppression of current degradation at high-drain voltages. Junction temperature measurements under varied output power densities reveal a 36% improvement in heat dissipation efficiency with the NCD passivation. These results fully demonstrate the promising potential of NCD for enhancing heat dissipation in high-power GaN devices. Full article

Integrating nanocrystalline diamond (NCD) films on silicon chips has great practical significance and many potential applications, including high-power electronic devices, microelectromechanical systems, optoelectronic devices, and biosensors. In this study, we provide a solution for ensuring heterogeneous interface integration between silicon (Si) chips and NCD films using low-temperature bonding technology. This paper details the design and implementation of a magnetron sputtering layer on an NCD surface, as well as the materials and process for the connection layer of the integrated interface. The obtained NCD/Ti/Cu composite layer shows uniform island-like Cu nanostructures with 100~200 nm diameters, which could promote bonding between NCD and Si chips. Ultimately, a heterogeneous interface preparation of Si/Ag/Cu/Ti/NCD was achieved, with the integration temperature not exceeding 250 °C. The TEM analysis shows the closely packed atomic interface of the Cu NPs and deposited Ti/Cu layers, revealing the bonding mechanism. Full article

Nanocrystalline diamond (NCD) films are attractive for many applications due to their smooth surfaces while holding the properties of diamond. However, their growth rate is generally low using common Ar/CH₄ with or without H₂ chemistry and strongly dependent on the overall growth conditions using microwave plasma chemical vapor deposition (MPCVD). In this work, incorporating a small amount of N₂ and O₂ additives into CH₄/H₂ chemistry offered a much higher growth rate of NCD films, which is promising for some applications. Several novel series of experiments were designed and conducted to tailor the growth features of NCD films by fine-tuning of the gas-phase compositions with different amounts of nitrogen and oxygen addition into CH₄/H₂ gas mixtures. The influence of growth parameters, such as the absolute amount and their relative ratios of O₂ and N₂ additives; substrate temperature, which was adjusted by two ways and inferred by simulation; and microwave power on NCD formation, was investigated. Short and long deposition runs were carried out to study surface structural evolution with time under identical growth conditions. The morphology, crystalline and optical quality, orientation, and texture of the NCD samples were characterized and analyzed. A variety of NCD films of high average growth rates ranging from 2.1 μm/h up to 6.7 μm/h were successfully achieved by slightly adjusting the O₂/CH₄ amounts from 6.25% to 18.75%, while that of N₂ was kept constant. The results clearly show that the beneficial use of fine-tuning of gas-phase compositions offers a simple and effective way to tailor the growth characteristics and physical properties of NCD films for optimizing the growth conditions to envisage some specific applications. Full article

While nano-crystalline diamond (NCD) is a promising engineering composite material for its unique mechanical properties, achieving the ultrahigh surface quality of NCD-based components through conventional grinding and polishing is challenging due to its exceptional hardness and brittleness. In the present work, we experimentally investigate the nanosecond laser ablation-induced graphitization characteristics of NCD, which provides a critical pretreatment method of NCD for realizing its superlative surface finish. Specifically, systematic experimental investigations of the nanosecond pulsed laser ablation of NCD are carried out, in which the characteristics of graphitization are qualitatively characterized by the Raman spectroscopy detection of the ablated area of the microhole and microgroove. Subsequently, the influence of laser processing parameters on the degree and morphological characteristics of graphitization is evaluated based on experimental data and related interpretation, from which optimized parameters for maximizing the graphitization of NCD are then identified. The findings reported in the current work provide guidance for promoting the machinability of NCD via laser irradiation-induced surface modification. Full article

In this study, the characteristics of nanocrystalline diamond films synthesized at low surface temperature on Ti-6Al-4V (TA6V) substrates using a distributed antenna array microwave reactor aiming at biomedical applications were investigated. The surface roughness of the TA6V substrates is varied by scratching with emery paper of 1200, 2400, 4000 polishing grit. Nanocrystalline diamond (NCD) coatings with morphology, purity, and microstructure comparable to those obtained on silicon substrates usually employed in the same reactor and growth conditions are successfully achieved whatever the polishing protocol. However, the latter has a significant effect on the roughness parameters and hardness of the NCD films. The use of the finest polishing grit thus permits us to enhance the hardness value, which can be related to the work-hardening phenomenon arising from the polishing process. Full article

Dry friction between seal faces, caused by unstable or extreme operating conditions, significantly affects the running stability and service life of mechanical seals. Therefore, in this work, nanocrystalline diamond (NCD) coatings were prepared on the surface of silicon carbide (SiC) seal rings by hot filament chemical vapor deposition (HFCVD). The friction test results under dry environment reveals that the coefficient of friction (COF) of SiC–NCD seal pairs is about 0.07–0.09, which were reduced by 83–86% compared to SiC–SiC seal pairs. The wear rate of SiC–NCD seal pairs is relatively low, ranging from 1.13 × 10⁻⁷ mm³/N·m to 3.26 × 10⁻⁷ mm³/N·m under different test conditions, which is due to the fact that the NCD coatings prevent adhesive and abrasive wear between the SiC seal rings. The analysis and observation of the wear tracks illustrate that the excellent tribological performance of the SiC–NCD seal pairs is due to a self-lubricating amorphous layer formed on the worn surface. In conclusion, this work highlights a pathway to enable mechanical seals to satisfy the high application requirements under highly parametric working conditions. Full article

Nano-crystalline diamond (NCD) coating to improve the performance of cutting tools, as the coating thickness varies, the cutting performance and lifespan of the tool varies because the radius of its cutting edge and coating surface roughness are altered. Therefore, an in-depth analysis on the impact of the variations in coating thickness on the cutting tool abrasion and quality of machined surface is necessary. In this study, two NCD ball endmills were coated with 8 and 12 μm thicknesses, and the tool abrasion and roughness of the machined plane were observed after milling. Furthermore, the morphology of the coated surface and abrased cutting edge were observed using a 3D confocal microscope. Consequently, we observed that individual nodules were formed on the continuous aggregates as the coating thickness increased, which increased the coated surface roughness. The two damage modes of the aggregation determined the dominant abrasion that occurred on the cutting edges of both types of coating thicknesses. Delamination and crater wear caused a sharp increase in the roughness of the machined surface. In summary, the increase in coating thickness delayed the delamination of the coating but increased the roughness of the cutting edge, which reduced the machined surface roughness. Full article

With the increased power density of gallium nitride (GaN) high electron mobility transistors (HEMTs), effective cooling is required to eliminate the self-heating effect. Incorporating diamond into GaN HEMT is an alternative way to dissipate the heat generated from the active region. In this review, the four main approaches for the integration of diamond and GaN are briefly reviewed, including bonding the GaN wafer and diamond wafer together, depositing diamond as a heat-dissipation layer on the GaN epitaxial layer or HEMTs, and the epitaxial growth of GaN on the diamond substrate. Due to the large lattice mismatch and thermal mismatch, as well as the crystal structure differences between diamond and GaN, all above works face some problems and challenges. Moreover, the review is focused on the state-of-art of polycrystalline or nanocrystalline diamond (NCD) passivation layers on the topside of GaN HEMTs, including the nucleation and growth of the diamond on GaN HEMTs, structure and interface analysis, and thermal characterization, as well as electrical performance of GaN HEMTs after diamond film growth. Upon comparing three different nucleation methods of diamond on GaN, electrostatic seeding is the most commonly used pretreatment method to enhance the nucleation density. NCDs are usually grown at lower temperatures (600–800 °C) on GaN HEMTs, and the methods of “gate after growth” and selective area growth are emphasized. The influence of interface quality on the heat dissipation of capped diamond on GaN is analyzed. We consider that effectively reducing the thermal boundary resistance, improving the regional quality at the interface, and optimizing the stress–strain state are needed to improve the heat-spreading performance and stability of GaN HEMTs. NCD-capped GaN HEMTs exhibit more than a 20% lower operating temperature, and the current density is also improved, which shows good application potential. Furthermore, the existing problems and challenges have also been discussed. The nucleation and growth characteristics of diamond itself and the integration of diamond and GaN HEMT are discussed together, which can more completely explain the thermal diffusion effect of diamond for GaN HEMT and the corresponding technical problems. Full article

In the present study, the tribological properties of diverse crystalline diamond coating with micro (MCD) and nanometer (NCD) sizes, fabricated by the microwave plasma chemical vapor deposition (MPCVD) method, are systematically investigated in dry and seawater environments, respectively. Owing to the SiO₂ lubricating film with extraordinary hydrophilicity performance by a tribochemical reaction, the average friction coefficient (COF) and wear rate of NCD coating under seawater decreased by 37.8% and 26.5%, respectively, comparing with in dry conditions. Furthermore, graphite would be generated with the increment of surface roughness. Graphite transformed from the diamond under high contact pressure. Thus, with the synergism between SiO₂ lubricating film with extraordinary hydrophilicity performance and graphite, the corresponding COF and wear rate of MCD would be further decreased by up to 64.1% and 39.5%. Meanwhile, various characterizations on morphology, spectra, and tribological performance of the deposited diamond coating were conducted to explore the in-depth mechanism of the enhanced tribological performance of our NCD and MCD coatings in the extreme under seawater working conditions. We envision this work would provide significant insights into the wear behavior of diamond coatings in seawater and broaden their applications in protective coatings for marine science. Full article

Diamond is a material of choice for the fabrication of optical windows and for protective and anti-reflecting coatings for optical materials. For these kinds of applications, the diamond coating must have a high purity and a low surface roughness to guarantee a high transparency. It should also be synthesized at low surface temperature to allow the deposition on low melting-point substrates such as glasses. In this work, the ability of a Distributed Antenna Array (DAA) microwave system operating at low temperature and low pressure in H₂/CH₄/CO₂ gas mixture to synthesize nanocrystalline diamond (NCD) films on borosilicate and soda-lime glass substrates is investigated aiming at optical applications. The influence of the substrate temperature and deposition time on the film microstructure and optical properties is examined. The best film properties are obtained for a substrate temperature below 300 °C. In these conditions, the growth rate is around 50 nm·h⁻¹ and the films are homogeneous and formed of spherical aggregates composed of nanocrystalline diamond grains of 12 nm in size. The resulting surface roughness is then very low, typically below 10 nm, and the diamond fraction is higher than 80%. This leads to a high transmittance of the NCD/glass systems, above 75%, and to a low absorption coefficient of the NCD film below 10³ cm⁻¹ in the visible range. The resulting optical band gap is estimated at 3.55 eV. The wettability of the surface evolves from a hydrophilic regime on the bare glass substrates to a more hydrophobic regime after NCD deposition, as assessed by the increase of the measured contact angle from less than 55° to 76° after the deposition of 100 nm thick NCD film. This study emphasizes that such transparent diamond films deposited at low surface temperature on glass substrate using the DAA microwave technology can find applications for optical devices. Full article

This paper submits experimental results of a study directed towards the formation of Eu ions’ luminescent centers in CVD diamond films. A new approach is based on use of diamond nanoparticles with a surface modified with Eu ions for seeding at CVD growth. Nanocrystalline diamond films (NCD) doped with Eu have been grown from the gas phase on silicon substrates by microwave plasma-assisted CVD at a frequency of 2.45 GHz. The photoluminescence spectra clearly show several electronic transitions of the Eu³⁺ ions, which confirm the incorporation of Eu ions into the NCD film. Full article