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Keywords = miniature ion pump

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8 pages, 2033 KiB  
Communication
Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source
by Yuichi Kurashima, Atsuhiko Maeda, Naoto Oshima, Taisei Motomura, Takashi Matsumae, Mitsuhiro Watanabe and Hideki Takagi
Sensors 2024, 24(12), 4000; https://doi.org/10.3390/s24124000 - 20 Jun 2024
Cited by 1 | Viewed by 1665
Abstract
In recent years, there has been significant interest in quantum technology, characterized by the emergence of quantum computers boasting immense processing power, ultra-sensitive quantum sensors, and ultra-precise atomic clocks. Miniaturization of quantum devices using cold atoms necessitates the employment of an ultra-high vacuum [...] Read more.
In recent years, there has been significant interest in quantum technology, characterized by the emergence of quantum computers boasting immense processing power, ultra-sensitive quantum sensors, and ultra-precise atomic clocks. Miniaturization of quantum devices using cold atoms necessitates the employment of an ultra-high vacuum miniature cell with a pressure of approximately 10−6 Pa or even lower. In this study, we developed an ultra-high vacuum cell realized by a miniature ion pump using a high-efficiency plasma source. Initially, an unsealed miniature ion pump was introduced into a vacuum chamber, after which the ion pump’s discharge current, depending on vacuum pressures, was evaluated. Subsequently, a miniature vacuum cell was fabricated by hermetically sealing the miniature vacuum pump. The cell was successfully evacuated by a miniature ion pump down to an ultra-high vacuum region, which was derived by the measured discharge current. Our findings demonstrate the feasibility of achieving an ultra-high vacuum cell necessary for the operation of miniature quantum devices. Full article
(This article belongs to the Special Issue MEMS and NEMS Sensors: 2nd Edition)
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8 pages, 3370 KiB  
Communication
High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps
by Yuichi Kurashima, Taisei Motomura, Shinya Yanagimachi, Takashi Matsumae, Mitsuhiro Watanabe and Hideki Takagi
Sensors 2023, 23(2), 1040; https://doi.org/10.3390/s23021040 - 16 Jan 2023
Cited by 3 | Viewed by 2320
Abstract
In this study, we design a highly efficient plasma source using a magnetic mirror trap with two opposing permanent magnets for a miniature high-efficiency ion pump. First, we simulated the distribution of the magnetic field line formed by the proposed magnetic mirror configuration. [...] Read more.
In this study, we design a highly efficient plasma source using a magnetic mirror trap with two opposing permanent magnets for a miniature high-efficiency ion pump. First, we simulated the distribution of the magnetic field line formed by the proposed magnetic mirror configuration. By optimizing the distance between two opposing permanent magnets and size of these magnets, a magnetic mirror ratio value of 27 could be obtained, which is an electron confinement efficiency of over 90%. We also conducted an experiment on a high-efficiency discharge plasma source for a miniature ion pump using an optimized magnetic circuit. As a result, we revealed that the proposed magnetic circuit has a pronounced effect on plasma generation, particularly in the high-vacuum region. Full article
(This article belongs to the Section Physical Sensors)
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13 pages, 9358 KiB  
Article
Cathode Design Optimization toward the Wide-Pressure-Range Miniature Discharge Ion Source for a Vacuum Micropump
by Tongtong Yao, Fei Tang, Jian Zhang and Xiaohao Wang
Sensors 2019, 19(3), 624; https://doi.org/10.3390/s19030624 - 1 Feb 2019
Cited by 1 | Viewed by 4025
Abstract
It is difficult to generate and maintain the vacuum level in vacuum MEMS (Micro-Electro-Mechanical Systems) devices. Currently, there is still no single method or device capable of generating and maintaining the desired vacuum level in a vacuum device for a long time. This [...] Read more.
It is difficult to generate and maintain the vacuum level in vacuum MEMS (Micro-Electro-Mechanical Systems) devices. Currently, there is still no single method or device capable of generating and maintaining the desired vacuum level in a vacuum device for a long time. This paper proposed a new wide-pressure-range miniature ion source, which can be applied to a vacuum micropump. The miniature ion source consists only of silicon electrodes and a glass substrate. Its operating pressure range covers seven orders of magnitude, starting from atmospheric pressure, a promising solution to the difficulty. Based on the principle of gas discharge, the ion source features a simple two-electrode structure with a two-stage electrode spacing, operating under DC voltage excitation. The first-stage electrode spacing of the ion source is small enough to ensure that it starts working at atmospheric pressure down to a certain reduced pressure when it automatically switches to discharge at the larger second-stage electrode spacing and operates from that pressure down to a high vacuum. Two configurations of the ion source have been tested: without-magnet, operating from atmospheric pressure down to 1 mbar; and with-magnet, operating from atmospheric pressure to 10−4 mbar, which covers seven orders of magnitude of pressure. The ion source can be applied not only to a MEMS ion pump to meet demands of a variety of vacuum MEMS devices, but can also be applied to other devices, such as vacuum microgauges and mass spectrometers. Full article
(This article belongs to the Section Physical Sensors)
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18 pages, 3647 KiB  
Article
Amperometric Sensor for Detection of Chloride Ions
by Libuse Trnkova, Vojtech Adam, Jaromir Hubalek, Petr Babula and Rene Kizek
Sensors 2008, 8(9), 5619-5636; https://doi.org/10.3390/s8095619 - 15 Sep 2008
Cited by 35 | Viewed by 14833
Abstract
Chloride ion sensing is important in many fields such as clinical diagnosis, environmental monitoring and industrial applications. We have measured chloride ions at a carbon paste electrode (CPE) and at a CPE modified with solid AgNO3, a solution of AgNO3 [...] Read more.
Chloride ion sensing is important in many fields such as clinical diagnosis, environmental monitoring and industrial applications. We have measured chloride ions at a carbon paste electrode (CPE) and at a CPE modified with solid AgNO3, a solution of AgNO3 and/or solid silver particles. Detection limits (3 S/N) for chloride ions were 100 μM, 100 μM and 10 μM for solid AgNO3, solution of AgNO3 and/or solid silver particles, respectively. The CPE modified with silver particles is the most sensitive to the presence chloride ions. After that we approached to the miniaturization of the whole electrochemical instrument. Measurements were carried out on miniaturized instrument consisting of a potentiostat with dimensions 35 × 166 × 125 mm, screen printed electrodes, a peristaltic pump and a PC with control software. Under the most suitable experimental conditions (Britton-Robinson buffer, pH 1.8 and working electrode potential 550 mV) we estimated the limit of detection (3 S/N) as 500 nM. Full article
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