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Search Results (5)

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Keywords = MEMS tactile sensor array

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13 pages, 8104 KB  
Article
Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array
by Hong Goo Yeo, Joontaek Jung, Minkyung Sim, Jae Eun Jang and Hongsoo Choi
Sensors 2020, 20(1), 315; https://doi.org/10.3390/s20010315 - 6 Jan 2020
Cited by 21 | Viewed by 8206
Abstract
This research focuses on the development of a flexible tactile sensor array consisting of aluminum nitride (AlN) based on micro-electro-mechanical system (MEMS) technology. A total of 2304 tactile sensors were integrated into a small area of 2.5 × 2.5 cm2. Five [...] Read more.
This research focuses on the development of a flexible tactile sensor array consisting of aluminum nitride (AlN) based on micro-electro-mechanical system (MEMS) technology. A total of 2304 tactile sensors were integrated into a small area of 2.5 × 2.5 cm2. Five hundred nm thick AlN film with strong c-axis texture was sputtered on Cr/Au/Cr (50/50/5 nm) layers as the sacrificial layer coated on a Si wafer. To achieve device flexibility, polydimethylsiloxane (PDMS) polymer and SU-8 photoresist layer were used as the supporting layers after etching away a release layer. Twenty-five mM (3-mercaptopropyl) trimethoxysilane (MPTMS) improves the adhesion between metal and polymers due to formation of a self-assembled monolayer (SAM) on the surface of the top electrode. The flexible tactile sensor has 8 × 8 channels and each channel has 36 sensor elements with nine SU-8 bump blocks. The tactile sensor array was demonstrated to be flexible by bending 90 degrees. The tactile sensor array was demonstrated to show clear spatial resolution through detecting the distinct electrical response of each channel under local mechanical stimulus. Full article
(This article belongs to the Special Issue Development of Piezoelectric Sensors and Actuators)
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13 pages, 3603 KB  
Article
A Flexible Capacitive Sensor with Encapsulated Liquids as Dielectrics
by Yasunari Hotta, Yuhua Zhang and Norihisa Miki
Micromachines 2012, 3(1), 137-149; https://doi.org/10.3390/mi3010137 - 13 Mar 2012
Cited by 18 | Viewed by 10253
Abstract
Flexible and high-sensitive capacitive sensors are demanded to detect pressure distribution and/or tactile information on a curved surface, hence, wide varieties of polymer-based flexible MEMS sensors have been developed. High-sensitivity may be achieved by increasing the capacitance of the sensor using solid dielectric [...] Read more.
Flexible and high-sensitive capacitive sensors are demanded to detect pressure distribution and/or tactile information on a curved surface, hence, wide varieties of polymer-based flexible MEMS sensors have been developed. High-sensitivity may be achieved by increasing the capacitance of the sensor using solid dielectric material while it deteriorates the flexibility. Using air as the dielectric, to maintain the flexibility, sacrifices the sensor sensitivity. In this paper, we demonstrate flexible and highly sensitive capacitive sensor arrays that encapsulate highly dielectric liquids as the dielectric. Deionized water and glycerin, which have relative dielectric constants of approximately 80 and 47, respectively, could increase the capacitance of the sensor when used as the dielectric while maintaining flexibility of the sensor with electrodes patterned on flexible polymer substrates. A reservoir of liquids between the electrodes was designed to have a leak path, which allows the sensor to deform despite of the incompressibility of the encapsulated liquids. The proposed sensor was microfabricated and demonstrated successfully to have a five times greater sensitivity than sensors that use air as the dielectric. Full article
(This article belongs to the Special Issue Polymer MEMS)
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20 pages, 9400 KB  
Article
The Role of Exploratory Conditions in Bio-Inspired Tactile Sensing of Single Topogical Features
by Raphaël Candelier, Alexis Prevost and Georges Debrégeas
Sensors 2011, 11(8), 7934-7953; https://doi.org/10.3390/s110807934 - 11 Aug 2011
Cited by 12 | Viewed by 9421
Abstract
We investigate the mechanism of tactile transduction during active exploration of finely textured surfaces using a tactile sensor mimicking the human fingertip. We focus in particular on the role of exploratory conditions in shaping the subcutaneous mechanical signals. The sensor has been designed [...] Read more.
We investigate the mechanism of tactile transduction during active exploration of finely textured surfaces using a tactile sensor mimicking the human fingertip. We focus in particular on the role of exploratory conditions in shaping the subcutaneous mechanical signals. The sensor has been designed by integrating a linear array of MEMS micro-force sensors in an elastomer layer. We measure the response of the sensors to the passage of elementary topographical features at constant velocity and normal load, such as a small hole on a flat substrate. Each sensor’s response is found to strongly depend on its relative location with respect to the substrate/skin contact zone, a result which can be quantitatively understood within the scope of a linear model of tactile transduction. The modification of the response induced by varying other parameters, such as the thickness of the elastic layer and the confining load, are also correctly captured by this model. We further demonstrate that the knowledge of these characteristic responses allows one to dynamically evaluate the position of a small hole within the contact zone, based on the micro-force sensors signals, with a spatial resolution an order of magnitude better than the intrinsic resolution of individual sensors. Consequences of these observations on robotic tactile sensing are briefly discussed. Full article
(This article belongs to the Section Physical Sensors)
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20 pages, 3755 KB  
Article
Roughness Encoding in Human and Biomimetic Artificial Touch: Spatiotemporal Frequency Modulation and Structural Anisotropy of Fingerprints
by Calogero Maria Oddo, Lucia Beccai, Johan Wessberg, Helena Backlund Wasling, Fabio Mattioli and Maria Chiara Carrozza
Sensors 2011, 11(6), 5596-5615; https://doi.org/10.3390/s110605596 - 26 May 2011
Cited by 50 | Viewed by 12172
Abstract
The influence of fingerprints and their curvature in tactile sensing performance is investigated by comparative analysis of different design parameters in a biomimetic artificial fingertip, having straight or curved fingerprints. The strength in the encoding of the principal spatial period of ridged tactile [...] Read more.
The influence of fingerprints and their curvature in tactile sensing performance is investigated by comparative analysis of different design parameters in a biomimetic artificial fingertip, having straight or curved fingerprints. The strength in the encoding of the principal spatial period of ridged tactile stimuli (gratings) is evaluated by indenting and sliding the surfaces at controlled normal contact force and tangential sliding velocity, as a function of fingertip rotation along the indentation axis. Curved fingerprints guaranteed higher directional isotropy than straight fingerprints in the encoding of the principal frequency resulting from the ratio between the sliding velocity and the spatial periodicity of the grating. In parallel, human microneurography experiments were performed and a selection of results is included in this work in order to support the significance of the biorobotic study with the artificial tactile system. Full article
(This article belongs to the Special Issue Bioinspired Sensor Systems)
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23 pages, 1484 KB  
Article
Artificial Roughness Encoding with a Bio-inspired MEMS-based Tactile Sensor Array
by Calogero Maria Oddo, Lucia Beccai, Martin Felder, Francesco Giovacchini and Maria Chiara Carrozza
Sensors 2009, 9(5), 3161-3183; https://doi.org/10.3390/s90503161 - 27 Apr 2009
Cited by 61 | Viewed by 16595
Abstract
A compliant 2x2 tactile sensor array was developed and investigated for roughness encoding. State of the art cross shape 3D MEMS sensors were integrated with polymeric packaging providing in total 16 sensitive elements to external mechanical stimuli in an area of about 20 [...] Read more.
A compliant 2x2 tactile sensor array was developed and investigated for roughness encoding. State of the art cross shape 3D MEMS sensors were integrated with polymeric packaging providing in total 16 sensitive elements to external mechanical stimuli in an area of about 20 mm2, similarly to the SA1 innervation density in humans. Experimental analysis of the bio-inspired tactile sensor array was performed by using ridged surfaces, with spatial periods from 2.6 mm to 4.1 mm, which were indented with regulated 1N normal force and stroked at constant sliding velocity from 15 mm/s to 48 mm/s. A repeatable and expected frequency shift of the sensor outputs depending on the applied stimulus and on its scanning velocity was observed between 3.66 Hz and 18.46 Hz with an overall maximum error of 1.7%. The tactile sensor could also perform contact imaging during static stimulus indentation. The experiments demonstrated the suitability of this approach for the design of a roughness encoding tactile sensor for an artificial fingerpad. Full article
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Italy)
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