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Journal: Metrology, 2023
Volume: 3
Number: 9
139-168
Article: Measurement Techniques for Three-Dimensional Metrology of High Aspect Ratio Internal Features—A Review
Authors: by Tom Hovell, Jon Petzing, Wen Guo, Connor Gill, Laura Justham, Niels Lohse and Peter Kinnell
Link: https://www.mdpi.com/2673-8244/3/2/9

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