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Journal: Micro, 2024
Volume: 4
Number: 27
Article:
Optical and Morphological Characterization of Nanoscale Oxides Grown in Low-Energy H+-Implanted c-Silicon
Authors:
by
Anna Szekeres, Sashka Alexandrova, Mihai Anastasescu, Hermine Stroescu, Mariuca Gartner and Peter Petrik
Link:
https://www.mdpi.com/2673-8023/4/3/27
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