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Journal: Eng. Proc., 2023
Volume: 58
Number: 82

Article: Optimization of the Geometry of a Microelectromechanical System Testing Device for SiO2—Polysilicon Interface Characterization
Authors: by Daniel Calegaro, Stefano Mariani, Massimiliano Merli and Giacomo Ferrari
Link: https://www.mdpi.com/2673-4591/58/1/82

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