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Journal: Eng. Proc., 2021
Volume: 4
Number: 30

Article: Dynamic Characterization of Biosensing MEMS Cantilevers with Different Position of the Driving Electrode—Vacuum Response Versus Ambient Conditions
Authors: by Marius Pustan, Corina Birleanu and Florina Serdean
Link: https://www.mdpi.com/2673-4591/4/1/30

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