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Journal: Eng. Proc., 2023
Volume: 37
Number: 90
Article:
Predictive Evaluation of Atomic Layer Deposition Characteristics for Synthesis of Al2O3 thin Films
Authors:
by
Sachin Shendokar, Moha Feroz Hossen, Swapnil Nalawade, Shobha Mantripragada and Shyam Aravamudhan
Link:
https://www.mdpi.com/2673-4591/37/1/90
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