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Journal: Eng. Proc., 2023
Volume: 37
Number: 90

Article: Predictive Evaluation of Atomic Layer Deposition Characteristics for Synthesis of Al2O3 thin Films
Authors: by Sachin Shendokar, Moha Feroz Hossen, Swapnil Nalawade, Shobha Mantripragada and Shyam Aravamudhan
Link: https://www.mdpi.com/2673-4591/37/1/90

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