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Journal: Appl. Nano, 2023
Volume: 4
Number: 16

Article: Magnetron Sputter Deposition of Nanostructured AlN Thin Films
Authors: by Manohar Chirumamilla, Tobias Krekeler, Deyong Wang, Peter K. Kristensen, Martin Ritter, Vladimir N. Popok and Kjeld Pedersen
Link: https://www.mdpi.com/2673-3501/4/4/16

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