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Journal: Plasma, 2023
Volume: 6
Number: 17

Article: Combinatorial Synthesis of AlTiN Thin Films
Authors: by Ferrine Gianne G. Reyes, Jason P. Licerio, Aian B. Ontoria and Magdaleno R. Vasquez, Jr.
Link: https://www.mdpi.com/2571-6182/6/2/17

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