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Journal: Proceedings, 2024
Volume: 97
Number: 144

Article: A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors
Authors: by Clement Fleury, Markus Bainschab, Gianluca Mendicino, Roberto Carminati, Pooja Thakkar, Dominik Holzmann, Sara Guerreiro and Adrien Piot

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