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Proceeding Paper

Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone †

Department of Engineering, University of Cambridge, Cambridge CB3 0FA, UK
*
Author to whom correspondence should be addressed.
Presented at the 4th Edition of the nanoFIS—Functional Integrated nano Systems Conference, Graz, Austria, 2–4 November 2020.
Proceedings 2020, 56(1), 3; https://doi.org/10.3390/proceedings2020056003
Published: 7 December 2020
In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. The gas sensor has all the benefits of CMOS technology, including low cost and miniaturization. Here, we demonstrate its application for CO2 gas detection.
Keywords: thermal acoustic; gas sensor; CMOS; MEMS thermal acoustic; gas sensor; CMOS; MEMS
MDPI and ACS Style

Hopper, R.; Popa, D.; Tsoutsouras, V.; Udrea, F.; Stanley-Marbell, P. Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone. Proceedings 2020, 56, 3. https://doi.org/10.3390/proceedings2020056003

AMA Style

Hopper R, Popa D, Tsoutsouras V, Udrea F, Stanley-Marbell P. Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone. Proceedings. 2020; 56(1):3. https://doi.org/10.3390/proceedings2020056003

Chicago/Turabian Style

Hopper, Richard, Daniel Popa, Vasileios Tsoutsouras, Florin Udrea, and Phillip Stanley-Marbell. 2020. "Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone" Proceedings 56, no. 1: 3. https://doi.org/10.3390/proceedings2020056003

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