Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone †
Department of Engineering, University of Cambridge, Cambridge CB3 0FA, UK
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Author to whom correspondence should be addressed.
†
Presented at the 4th Edition of the nanoFIS—Functional Integrated nano Systems Conference, Graz, Austria, 2–4 November 2020.
Proceedings 2020, 56(1), 3; https://doi.org/10.3390/proceedings2020056003
Published: 7 December 2020
(This article belongs to the Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems)
In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. The gas sensor has all the benefits of CMOS technology, including low cost and miniaturization. Here, we demonstrate its application for CO2 gas detection.
Keywords:
thermal acoustic; gas sensor; CMOS; MEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
MDPI and ACS Style
Hopper, R.; Popa, D.; Tsoutsouras, V.; Udrea, F.; Stanley-Marbell, P. Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone. Proceedings 2020, 56, 3. https://doi.org/10.3390/proceedings2020056003
AMA Style
Hopper R, Popa D, Tsoutsouras V, Udrea F, Stanley-Marbell P. Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone. Proceedings. 2020; 56(1):3. https://doi.org/10.3390/proceedings2020056003
Chicago/Turabian StyleHopper, Richard, Daniel Popa, Vasileios Tsoutsouras, Florin Udrea, and Phillip Stanley-Marbell. 2020. "Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone" Proceedings 56, no. 1: 3. https://doi.org/10.3390/proceedings2020056003
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