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The Study of the Structure Based on the Array of ZnO-Nanorods as a Sensor of the Gas Flow Rate

Southern Federal University, Research and Education and Centre “Microsystem Technics and Multisensor Monitoring Systems”, 2, Chekhov St., 347922 Taganrog, Russia
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Presented at the 6th International Electronic Conference on Sensors and Applications, 15–30 November 2019; Available online:https://ecsa-6.sciforum.net/.
Proceedings 2020, 42(1), 42; https://doi.org/10.3390/ecsa-6-06643
Published: 17 April 2020
This work shows the possibility of using arrays of ZnO nanorods grown on a glass substrate as a sensitive element for measuring air flow velocity. Since oxide semiconductors have a temperature dependence of resistance, a theoretical and experimental assessment was made of the influence of air velocity on the increase in resistance of a sensitive element. It has been theoretically shown that when air is blown through, the temperature of the free end of the ZnO nanorod can decrease by several degrees. An experimental evaluation showed that when gas is blown at a speed of 12.5 cm/s, the resistance of the sensing element increases by about 20%, which is equivalent to a temperature increase of about 4 degrees. In addition, it was found that the dependence of the increase in the resistance of the sensitive element when exposed to an air flow from 0 to 12.5 cm / s is close to linear.
Keywords: Zinc oxide nanorods; electrical resistance; sensing element; gas flow rate Zinc oxide nanorods; electrical resistance; sensing element; gas flow rate
MDPI and ACS Style

Petrov, V.; Starnikova, A. The Study of the Structure Based on the Array of ZnO-Nanorods as a Sensor of the Gas Flow Rate. Proceedings 2020, 42, 42.

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