Harvester of Energy on Pb(Zr, Ti)O3 Thin Films †
Southern Federal University, Research and Education and Centre “Microsystem technics and multisensor monitoring systems”, 2, Chekhov St., Taganrog 347922, Russia
†
Presented at the 5th International Electronic Conference on Sensors and Applications, 15–30 November 2018; Available online: https://ecsa-5.sciforum.net.
Proceedings 2019, 4(1), 40; https://doi.org/10.3390/ecsa-5-05870
Published: 20 November 2018
(This article belongs to the Proceedings of 5th International Electronic Conference on Sensors and Applications)
Abstract
:The design was developed and investigated, and a laboratory sample of energy harvester based on 1–1.5 μm thick lead zirconate titanate Pb(Zr, Ti)O3 (PZT) films was assembled. PZT films were formed on oxidized silicon by high-frequency reactive plasma sputtering in the oxygen atmosphere. The laboratory sample of the energy harvester was sensitive to mechanical acceleration and vibration. Testing of sensors on a special electrodynamic stand showed that the sensor has a high sensitivity in the frequency range from 2–5 Hz with a sensitivity of up to 75 pС/g, which corresponds to a sensitivity of 1.2–1.5 V/g. The same design of the energy harvester was sensitive to scattered electromagnetic energy with a sensitivity of 6.8 10−4 V/(V/cm). The maximum response to the electromagnetic field was observed at a frequency of 100−200 Hz.
1. Introduction
Recently, much attention has been paid to the development of instruments for collecting and converting energy dispersed by the environment—energy harvesters [1,2,3,4]. The main materials used to convert mechanical energy (energy of motion, vibrations) into electrical energy are piezo- and ferroelectric materials. The most popular material that has a significant piezoelectric effect is lead zirconate titanate Pb(Zr, Ti)O3 (PZT), which is widely used in electromechanical sensors, actuators and electrostatic energy generators [5]. Due to their high piezoelectric properties [6], PZT films are used in energy harvesters [7]. PZT films are formed by the method of high-frequency reactive plasma sputtering [8], a sol-gel method [9] of pulsed laser deposition [10].
The most common design of piezoelectric energy harvesters is a balk construction fixed on one side [6,9,11]. This design is widely used in microelectromechanical structures (MEMS). Silicon or metal is used as the balk material. The active material is a ferroelectric film. The small size of this design allows to reduce the resonant frequency and expand the range of mechanical deformations, thus increasing the conversion efficiency [12].
2. Materials and Methods
One of the main materials for piezoelectric energy harvesters is PZT, which has high piezoelectric properties with a Zr / Ti ratio of 0.48…0.5..
We have developed a laboratory sample of energy harvesters based on thin PZT films with a thickness of 1.0–1.5 μm, shown in Figure 1 [8,13,14]. PZT films were formed by high-frequency reactive plasma sputtering in the oxygen atmosphere. Films were formed on top of a thin layer of silicon dioxide.
Metallic (Cu-Ni-V) contacts were formed over the PZT film. The size of the laboratory sample was 20 × 10 × 0.3 mm3. One end of the sample was secured by mechanical clamping. Two wires were soldered to metal contacts.
To study the effect of vibration, the laboratory sample was placed in a metal housing. In the housing, there were mounted connectors for connecting the energy harvester to the charge sensitive amplifier PШ2731E (Russia) and the Tektronix TBS1042 (China) oscilloscope. The input impedance of the amplifier was not worse than 1010 Ohm, and the amplification factor was equal to 1mV/pC.
The energy harvester was tested for vibrations by a calibrated load on the ВСВ-206 (Russia) electrodynamic test bench. The energy harvester was tested for the effects of accelerations from 0.08 to 5 g in the frequency range from 2 to 90 Hz [14].
To study the effect of an alternating electric field, a laboratory sample was placed between two metallic electrodes. The dimensions of the electrodes were slightly larger than the sample size. An alternating electric field was generated between the electrodes with a frequency from 20 Hz to 100 kHz and electric intensity varied in the range of 1–100 V/cm. Measurements were performed using the above amplifier and oscilloscope.
3. Results
The resulting sample was sensitive to mechanical acceleration and vibration. Tests of the sensor with a calibrated load were carried out on a special electrodynamic stand. It was demonstrated that the laboratory sample of the energy harvester exhibits a power dependence of sensitivity on the acceleration frequency. The highest sensitivity is manifested in the frequency range from 2–5 Hz with a sensitivity of up to 75 pC/g, shown in Figure 2a.
The same sensor design turned out to be sensitive to scattered electromagnetic energy. Measurements in the range of 1–100 V/cm showed that sensitivity to field strength was 6.8∙10−4V/(V/cm). The maximum sensitivity was achieved at frequencies of the electromagnetic field of 100–200 Hz, as shown in Figure 2b.
The higher sensitivity of the energy harvester to the electromagnetic field with a frequency of 100–200 Hz can be explained by the fact that there are domains in the structure of PZT that can change their orientation at the specified frequency. With a higher frequency of the electromagnetic field, they no longer had time to react to its change.
It is known that the intensity of scattered electromagnetic fields in the atmosphere can reach up to hundreds of V/m. In the case of using thousands of such energy harvesters, you can get an output signal up to 1 V.
Thus, on the basis of small-sized structures based on PZT films, it is possible to obtain autonomous energy sources.
Funding
The reported study was funded by RFBR according to the research project No. 18-29-11019.
Conflicts of Interest
The funders had no role in the design of the study; in the collection, analyses, or interpretation of data; in the writing of the manuscript, or in the decision to publish the results.
References
- Radousky, H.B.; Liang, H. Energy harvesting: An integrated view of materials, devices and applications. Nanotechnology 2012, 23, 1–35. [Google Scholar] [CrossRef] [PubMed]
- Khan, A.; Abas, Z.; Kim, H.S.; Oh, I.-K. Piezoelectric thin films: An integrated review of transducers and energy harvesting. Smart Mater. Struct. 2016, 25, 1–16. [Google Scholar] [CrossRef]
- Bowen, C.R.; Kim, H.A.; Weaver, P.M.; Dunn, S. Piezoelectric and ferroelectric materials and structures for energy harvesting applications. Energy Environ. Sci. 2014, 7, 25–44. [Google Scholar] [CrossRef]
- Li, H.; Tian, C.; Deng, Z.D. Energy harvesting from low frequency applications using piezoelectric materials. Appl. Phys. Rev. 2014, 1, 1–20. [Google Scholar] [CrossRef]
- Izyumskaya, N.; Alivov, Y.-I.; Cho, S.-J.; Morkocet, H. Processing, Structure, Properties, and Applications of PZT Thin Films. Crit. Rev. Solid State Mater. Sci. 2007, 32, 111–202. [Google Scholar] [CrossRef]
- Kim, M.; Hwang, B.; Jeong, J.; Min, N.K.; Kwon, K.H. Micromachining of a bimorph Pb(Zr,Ti)O3 (PZT) cantilever using a micro-electromechanical systems (MEMS) process for energy harvesting application. J. Nanosci. Nanotechnol. 2012, 12, 6011–6015. [Google Scholar] [CrossRef] [PubMed]
- Kang, M.-G.; Jung, W.-S.; Kang, C.-Y.; Yoon, S.-J. Recent Progress on PZT Based Piezoelectric EnergyHarvesting Technologies. Actuators 2016, 5, 1–17. [Google Scholar] [CrossRef]
- Kovalenko, D.A.; Petrov, V.V. Researches of the Internal Mechanical Stresses Arising in Si-SiO2-PZT Structures. J. Nano-And Electron. Phys. 2015, 7, 1–5. [Google Scholar]
- Xiong, S.; Kawada, H.; Yamanaka, H.; Matsushima, T. Piezoelectric properties of PZT films prepared by the sol–gel method and their application in MEMS. Thin Solid Films 2008, 516, 5309–5312. [Google Scholar] [CrossRef]
- Gatabi, J.R.; Rahmana, S.; Amaro, A.; Nash, T.; Rojas-Ramirez, J.; Pandey, R.K.; Droopad, R. Tuning electrical properties of PZT film deposited by Pulsed Laser Deposition. Ceram. Int. 2017, 43, 6008–6012. [Google Scholar] [CrossRef]
- Kim, M.; Hwang, B.; Min, N.K.; Jeong, J.; Kwon, K.H.; Park, K.B. Design and fabrication of a PZT cantileverfor low frequency vibration energy harvesting. J. Nanosci. Nanotechnol. 2011, 11, 6510–6513. [Google Scholar] [CrossRef]
- Liu, H.C.; Tay, C.J.; Quan, C.G.; Kobayashi, T.; Lee, C. Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power. J. Microelectromech. Syst. 2011, 20, 1131–1142. [Google Scholar] [CrossRef]
- Kovalenko, D.A.; Petrov, V.V.; Klindukhov, V.G. Research of influence of technological parameters of formation of thin films of zirconate-titanate of lead on their structural and electrophysical properties. Izvestiya SFedU Eng. Sci. 2014, 9, 124–132. [Google Scholar]
- Petrov, V.V.; Kemencev, А.S.; Cherepakhin, I.I.; Kovalenko, D.A. Investigation of the characteristics of a vibration sensor based on ferroelectric films of lead zirconate titanate. Izvestiya SFedU Eng. Sci. 2016, 10, 12–19. [Google Scholar]
Figure 1.
Schematic of laboratory sample of energy harvester: 1—wires; 2—contact pads; 3— lead zirconate titanate Pb(Zr, Ti)O3 (PZT) film; 4—silicon oxide; 5—silicon.
Figure 1.
Schematic of laboratory sample of energy harvester: 1—wires; 2—contact pads; 3— lead zirconate titanate Pb(Zr, Ti)O3 (PZT) film; 4—silicon oxide; 5—silicon.
Figure 2.
Dependence of energy harvester sensitivity on mechanical oscillations (a) and its response on the frequency of the electric field (b).
Figure 2.
Dependence of energy harvester sensitivity on mechanical oscillations (a) and its response on the frequency of the electric field (b).
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Petrov, V. Harvester of Energy on Pb(Zr, Ti)O3 Thin Films. Proceedings 2019, 4, 40. https://doi.org/10.3390/ecsa-5-05870
AMA Style
Petrov V. Harvester of Energy on Pb(Zr, Ti)O3 Thin Films. Proceedings. 2019; 4(1):40. https://doi.org/10.3390/ecsa-5-05870
Chicago/Turabian StylePetrov, Victor. 2019. "Harvester of Energy on Pb(Zr, Ti)O3 Thin Films" Proceedings 4, no. 1: 40. https://doi.org/10.3390/ecsa-5-05870
APA StylePetrov, V. (2019). Harvester of Energy on Pb(Zr, Ti)O3 Thin Films. Proceedings, 4(1), 40. https://doi.org/10.3390/ecsa-5-05870
