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Proceedings 2018, 2(8), 556; https://doi.org/10.3390/ICEM18-05483

Phase-Shifting Shearing Interference Microscope with Savart Shear Prism and Rotatable Analyzer

1
Department of Electro-optical Engineering, National Taipei University of Technology, 1, Sec. 3, Chung-Hsiao East Road, Taipei 10608, Taiwan
2
Shuztung Machinery Industrial Co., Ltd., 30, Houke S. Rd., Houli Dist., Taichung City 42152, Taiwan
Presented at the 18th International Conference of experimental Mechanics (ICEM18), Brussels, Belgium, 1–5 July 2018.
*
Author to whom correspondence should be addressed.
Published: 28 August 2018
PDF [308 KB, uploaded 3 September 2018]

Abstract

A phase-shifting shearing interference microscope (PSSIM) is introduced in this paper. It is constructed by placing a Savart shear prism between the objective and sample of a polarizing microscope with a rotatable analyzer as the phase-shifter, and it is capable of determining contour height variation and deformation strain using the principle of shearing interferometry. This paper not only interprets the measurement theory but also presents an experimental setup of the PSSIM. Moreover, this paper exhibits the results from the uses of the setup; the results demonstrate the validity and applicability of the PSSIM.
Keywords: phase-shifting; shearing interference microscope; Savart shear prism; rotatable analyzer; contour height variation; strain phase-shifting; shearing interference microscope; Savart shear prism; rotatable analyzer; contour height variation; strain
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Lin, S.-T.; Trịnh, H.-X.; Chen, Z.-W.; Lin, Y.-H. Phase-Shifting Shearing Interference Microscope with Savart Shear Prism and Rotatable Analyzer. Proceedings 2018, 2, 556.

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