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Journal: Proceedings, 2018
Volume: 2
Number: 913
Article:
AlN-on-Si Square Diaphragm Piezoelectric Micromachined Ultrasonic Transducer with Extended Range of Detection
Authors:
by
Suresh Alasatri, Libor Rufer and Joshua En-Yuan Lee
Link:
https://www.mdpi.com/2504-3900/2/13/913
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