Next Article in Journal
InGaN/GaN nanoLED Arrays as a Novel Illumination Source for Biomedical Imaging and Sensing Applications
Previous Article in Journal
Ultra-Thin Integrated ALD Al2O3 Electron-Transparent Windows for TEM Nanoreactor Applications
Proceeding Paper

Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

VTT Technical Research Centre of Finland Ltd., Espoo, P.O. Box 1000, FI-02044 VTT, Finland
*
Author to whom correspondence should be addressed.
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 894; https://doi.org/10.3390/proceedings2130894
Published: 6 December 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.
Keywords: thermoelectric bolometer; silicon membrane; infrared thermoelectric bolometer; silicon membrane; infrared
MDPI and ACS Style

Varpula, A.; Grigoras, K.; Tappura, K.; Timofeev, A.V.; Shchepetov, A.; Hassel, J.; Ahopelto, J.; Prunnila, M. Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection. Proceedings 2018, 2, 894. https://doi.org/10.3390/proceedings2130894

AMA Style

Varpula A, Grigoras K, Tappura K, Timofeev AV, Shchepetov A, Hassel J, Ahopelto J, Prunnila M. Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection. Proceedings. 2018; 2(13):894. https://doi.org/10.3390/proceedings2130894

Chicago/Turabian Style

Varpula, Aapo, Kestutis Grigoras, Kirsi Tappura, Andrey V. Timofeev, Andrey Shchepetov, Juha Hassel, Jouni Ahopelto, and Mika Prunnila. 2018. "Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection" Proceedings 2, no. 13: 894. https://doi.org/10.3390/proceedings2130894

Find Other Styles
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop