Next Article in Journal
An Optical Inclinometer Exploiting Magnetic Fluids
Previous Article in Journal
Application of a Novel Low-Cost Hyperspectral Imaging Setup Operating in the Mid-Infrared Region
Article Menu
Issue 13 (Eurosensors 2018) cover image

Export Article

Open AccessProceedings
Proceedings 2018, 2(13), 799;

Numerical Investigations of Infrared Slot Waveguides for Gas Sensing

Carinthian Tech Research AG, 9524 Villach, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria
Infineon Technologies Austria AG, 9500 Villach, Austria
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Author to whom correspondence should be addressed.
Published: 30 November 2018
(This article belongs to the Proceedings of Eurosensors 2018)
PDF [833 KB, uploaded 30 November 2018]


Sensing of gases is a promising area for applications of photonic sensor devices that operate in the mid-infrared spectral range. We present a numerical investigation of slot waveguides for evanescent field sensing of CO2. The sensor platform is a poly-silicon slot waveguide on silicon dioxide, where both layers are deposited on a standard silicon substrate. The evanescent field ratio, which is a crucial parameter for the sensing performance of the waveguides, was determined and values as high as 42% were obtained.
Keywords: silicon photonics; mid-infrared sensing; slot waveguide silicon photonics; mid-infrared sensing; slot waveguide
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Ranacher, C.; Consani, C.; Jannesari, R.; Grille, T.; Jakoby, B. Numerical Investigations of Infrared Slot Waveguides for Gas Sensing. Proceedings 2018, 2, 799.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Metrics

Article Access Statistics



[Return to top]
Proceedings EISSN 2504-3900 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top