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Proceedings 2018, 2(13), 799; https://doi.org/10.3390/proceedings2130799

Numerical Investigations of Infrared Slot Waveguides for Gas Sensing

1
Carinthian Tech Research AG, 9524 Villach, Austria
2
Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria
3
Infineon Technologies Austria AG, 9500 Villach, Austria
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
*
Author to whom correspondence should be addressed.
Published: 30 November 2018
(This article belongs to the Proceedings of Eurosensors 2018)
PDF [833 KB, uploaded 30 November 2018]

Abstract

Sensing of gases is a promising area for applications of photonic sensor devices that operate in the mid-infrared spectral range. We present a numerical investigation of slot waveguides for evanescent field sensing of CO2. The sensor platform is a poly-silicon slot waveguide on silicon dioxide, where both layers are deposited on a standard silicon substrate. The evanescent field ratio, which is a crucial parameter for the sensing performance of the waveguides, was determined and values as high as 42% were obtained.
Keywords: silicon photonics; mid-infrared sensing; slot waveguide silicon photonics; mid-infrared sensing; slot waveguide
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Ranacher, C.; Consani, C.; Jannesari, R.; Grille, T.; Jakoby, B. Numerical Investigations of Infrared Slot Waveguides for Gas Sensing. Proceedings 2018, 2, 799.

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