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Application of a Novel Low-Cost Hyperspectral Imaging Setup Operating in the Mid-Infrared Region
Open AccessProceedings

Numerical Investigations of Infrared Slot Waveguides for Gas Sensing

Carinthian Tech Research AG, 9524 Villach, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria
Infineon Technologies Austria AG, 9500 Villach, Austria
Author to whom correspondence should be addressed.
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 799;
Published: 30 November 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
Sensing of gases is a promising area for applications of photonic sensor devices that operate in the mid-infrared spectral range. We present a numerical investigation of slot waveguides for evanescent field sensing of CO2. The sensor platform is a poly-silicon slot waveguide on silicon dioxide, where both layers are deposited on a standard silicon substrate. The evanescent field ratio, which is a crucial parameter for the sensing performance of the waveguides, was determined and values as high as 42% were obtained.
Keywords: silicon photonics; mid-infrared sensing; slot waveguide silicon photonics; mid-infrared sensing; slot waveguide
MDPI and ACS Style

Ranacher, C.; Consani, C.; Jannesari, R.; Grille, T.; Jakoby, B. Numerical Investigations of Infrared Slot Waveguides for Gas Sensing. Proceedings 2018, 2, 799.

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