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Open AccessProceedings

Numerical Investigations of Infrared Slot Waveguides for Gas Sensing

1
Carinthian Tech Research AG, 9524 Villach, Austria
2
Institute for Microelectronics and Microsensors, Johannes Kepler University, 4040 Linz, Austria
3
Infineon Technologies Austria AG, 9500 Villach, Austria
*
Author to whom correspondence should be addressed.
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 799; https://doi.org/10.3390/proceedings2130799
Published: 30 November 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
Sensing of gases is a promising area for applications of photonic sensor devices that operate in the mid-infrared spectral range. We present a numerical investigation of slot waveguides for evanescent field sensing of CO2. The sensor platform is a poly-silicon slot waveguide on silicon dioxide, where both layers are deposited on a standard silicon substrate. The evanescent field ratio, which is a crucial parameter for the sensing performance of the waveguides, was determined and values as high as 42% were obtained.
Keywords: silicon photonics; mid-infrared sensing; slot waveguide silicon photonics; mid-infrared sensing; slot waveguide
MDPI and ACS Style

Ranacher, C.; Consani, C.; Jannesari, R.; Grille, T.; Jakoby, B. Numerical Investigations of Infrared Slot Waveguides for Gas Sensing. Proceedings 2018, 2, 799.

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