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Proceedings 2018, 2(13), 739;

Optimization of Si-Based Waveguides for Evanescent-Field Sensors

Carinthian Tech Research AG, 9524 Villach, Austria
Infineon Technologies Austria AG, 9500 Villach, Austria
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Author to whom correspondence should be addressed.
Published: 30 November 2018
(This article belongs to the Proceedings of Eurosensors 2018)
PDF [519 KB, uploaded 30 November 2018]


We present a detailed study of Si-based optical waveguides, which can be used as evanescent field sensors for the quantitative analysis of various gases and liquids. Direct quantitative comparison of simulation with experimental results of directional coupling structures allows fine-tuning the material parameters and provides important input for future sensor design.
Keywords: silicon photonics; mid-infrared sensing; evanescent field sensor; strip waveguide silicon photonics; mid-infrared sensing; evanescent field sensor; strip waveguide
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Tortschanoff, A.; Ranacher, C.; Consani, C.; Grille, T.; Moridi, M. Optimization of Si-Based Waveguides for Evanescent-Field Sensors. Proceedings 2018, 2, 739.

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