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Journal: Proceedings, 2017
Volume: 1
Number: 551
551
Article: Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films
Authors: by Thierry Camps, Sami Abada, Benjamin Reig, Jean-Baptiste Doucet, Rémi Courson, Laurène Salvi, Benjamin Boisnard, Emmanuelle Daran and Véronique Bardinal
Link: https://www.mdpi.com/2504-3900/1/4/551

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