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Journal: Proceedings, 2017
Volume: 1
Number: 371
371
Article: Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries
Authors: by Maik Bertke, Uili Wobeto Reinheimer, Michael Fahrbach, Gerry Hamdana, Hutomo Suryo Wasisto and Erwin Peiner
Link: https://www.mdpi.com/2504-3900/1/4/371

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