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Proceedings 2017, 1(4), 366;

Thin Film PZT Acoustic Sensor for Fully Implantable Cochlear Implants

Department of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey
MEMS Research and Application Center, Middle East Technical University, Ankara, Turkey
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 22 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [959 KB, uploaded 22 August 2017]


This paper presents design and fabrication of a MEMS-based thin film piezoelectric transducer to be placed on an eardrum for fully-implantable cochlear implant (FICI) applications. Resonating at a specific frequency within the hearing band, the transducer senses eardrum vibration and generates the required voltage output for the stimulating circuitry. Moreover, high sensitivity of the sensor, 391.9 mV/Pa @900 Hz, decreases the required power for neural stimulation. The transducer provides highest voltage output in the literature (200 mVpp @100 dB SPL) to our knowledge. A multi-frequency piezoelectric sensor, covering the daily acoustic band, is designed based on the test results and validated through FEA. The implemented system provides mechanical filtering, and mimics the natural operation of the cochlea. Herewith, the proposed sensor overcomes the challenges in FICI operations and demonstrates proof-of-concept for next generation FICIs.
Keywords: cochlear implant; acoustic sensor; MEMS vibration-based transducers; thin film PZT cochlear implant; acoustic sensor; MEMS vibration-based transducers; thin film PZT
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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İlik, B.; Koyuncuoğlu, A.; Uluşan, H.; Chamanian, S.; Işık, D.; Şardan-Sukas, Ö.; Külah, H. Thin Film PZT Acoustic Sensor for Fully Implantable Cochlear Implants. Proceedings 2017, 1, 366.

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