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Journal: Proceedings, 2017
Volume: 1
Number: 342
Article:
MEMS Capacitive Microphone with Dual-Anchored Membrane
Authors:
by
Chang Han Je, Ju Hyun Jeon, Sung Q. Lee and Woo Seok Yang
Link:
https://www.mdpi.com/2504-3900/1/4/342
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