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Proceedings 2017, 1(2), 21;

Amorphous SiC/c-ZnO-Based Lamb Mode Sensor for Liquid Environments

Institute of Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, Italy
Research Center in Industrial Technologies CRTI, ex-CSC, BP64 Cheraga, 10614 Algiers, Algeria
Presented at the 3rd International Electronic Conference on Sensors and Applications, 15–30 November 2016; Available online:
Author to whom correspondence should be addressed.
Published: 14 November 2016
PDF [846 KB, uploaded 27 June 2017]


The propagation of the first symmetric Lamb mode S0 along ZnO/a-SiC thin composite plates was modeled and analysed aimed at the design of a sensor able to detect the changes of the environmental parameters, such as added mass in vacuum and the liquid viscosity changes in a viscous liquid medium. The Lamb mode propagation was modeled by numerically solving the system of coupled electro-mechanical field equations in the two media. The S0 acoustic field profile was calculated aimed at finding the proper plate thickness suitable for the propagation of longitudinally polarized modes. The phase velocity and electroacoustic coupling efficiency dispersion curves of the S0 mode were calculated aimed at the design of enhanced coupling efficiency devices. The gravimetric sensitivity in vacuum, and the attenuation that the S0 mode soffers when contacting a liquid viscous Newtonian environment were finally calculated for different ZnO layer thicknesses. Recently obtained results on the sputtering deposition of the a-SiC and ZnO thin and thick layers on Si substrates are also reported.
Keywords: Lamb S0 mode; amorphous SiC; ZnO; coupling configurations; sensors; viscous liquids Lamb S0 mode; amorphous SiC; ZnO; coupling configurations; sensors; viscous liquids
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Caliendo, C.; Hamidullah, M.; Laidoudi, F. Amorphous SiC/c-ZnO-Based Lamb Mode Sensor for Liquid Environments. Proceedings 2017, 1, 21.

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