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Journal: Quantum Beam Sci., 2024
Volume: 8
Number: 12
Article:
Modification of Cu Oxide and Cu Nitride Films by Energetic Ion Impact
Authors:
by
Noriaki Matsunami, Masao Sataka, Satoru Okayasu and Bun Tsuchiya
Link:
https://www.mdpi.com/2412-382X/8/2/12
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