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Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite

Department of Mechanical Engineering, Yamaguchi University, 2-16-1 Tokiwadai, Ube, Yamaguchi 755-8611, Japan
Department of Intelligent Mechanical Systems Engineering, Kagawa University, 2217-20 Hayashi-cho, Takamatsu, Kagawa 761-0396, Japan
Department of Micro Engineering, Kyoto University, Kyoto Daigaku-Katsura, Nishikyo-ku, Kyoto 615-8540, Japan
Division of Mechanical Science of Technology, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan
JST, PRESTO, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan
Author to whom correspondence should be addressed.
Magnetochemistry 2018, 4(1), 7;
Received: 30 November 2017 / Revised: 22 December 2017 / Accepted: 2 January 2018 / Published: 6 January 2018
(This article belongs to the Special Issue Magnetic Fields in Microfluidic Systems)
PDF [3499 KB, uploaded 6 January 2018]


Microvalves play an important role in fluid control in micro total analysis systems (µTAS). Previous studies have reported complex fabrication processes for making microvalve elements in a channel. Hence, there is a need for a simpler microvalve fabrication method for achieving throughput improvement and cost reduction in µTAS. In this study, we propose a simple fabrication method for a magnetically driven microvalve array using a photosensitive composite. The composite was prepared by mixing a photoresist and magnetic particles of pure iron. The simple fabrication process was performed by using a laminating layer composed of a sacrificial part and the composite in a channel. The microvalve elements were fabricated by one-step photolithography using the processability of the sacrificial layer and composite. Further, we demonstrated the magnetic driving property of the fabricated microvalve array device. Compared to devices containing non-driving microvalves, the flow rate was decreased by 50%, and the pressure difference between the inlet and outlet increased by up to 4 kPa with increase in driving microvalve elements. These results imply that our proposed device could be useful for practical µTAS applications. View Full-Text
Keywords: MEMS; µTAS; microfluidic system; microvalve; magnetic particle; photosensitive composite MEMS; µTAS; microfluidic system; microvalve; magnetic particle; photosensitive composite

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Nakahara, T.; Suzuki, J.; Hosokawa, Y.; Shimokawa, F.; Kotera, H.; Suzuki, T. Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite. Magnetochemistry 2018, 4, 7.

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