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Journal: Inorganics, 2025
Volume: 13
Number: 289
Article:
Effect of Composition on Electrical Resistivity and Secondary Electron Emission Regularities of Tantalum Nitride Films Fabricated by Sputtering with Various Nitrogen Gas Flow Ratios
Authors:
by
Yali Su, Quantai Wang and Tiantian Wang
Link:
https://www.mdpi.com/2304-6740/13/9/289
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