Ar+-Implanted Si-Waveguide Photodiodes for Mid-Infrared Detection
Abstract
:1. Introduction
2. Materials and Methods
2.1. Fabrication
2.2. Experimental Setup
3. Results
3.1. Experimental Setup
3.2. Experimental Results
4. Discussion and Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Souhan, B.; Chen, C.P.; Lu, M.; Stein, A.; Bakhru, H.; Grote, R.R.; Bergman, K.; Green, W.M.J.; Osgood, R.M. Ar+-Implanted Si-Waveguide Photodiodes for Mid-Infrared Detection. Photonics 2016, 3, 46. https://doi.org/10.3390/photonics3030046
Souhan B, Chen CP, Lu M, Stein A, Bakhru H, Grote RR, Bergman K, Green WMJ, Osgood RM. Ar+-Implanted Si-Waveguide Photodiodes for Mid-Infrared Detection. Photonics. 2016; 3(3):46. https://doi.org/10.3390/photonics3030046
Chicago/Turabian StyleSouhan, Brian, Christine P. Chen, Ming Lu, Aaron Stein, Hassaram Bakhru, Richard R. Grote, Keren Bergman, William M. J. Green, and Richard M. Osgood. 2016. "Ar+-Implanted Si-Waveguide Photodiodes for Mid-Infrared Detection" Photonics 3, no. 3: 46. https://doi.org/10.3390/photonics3030046
APA StyleSouhan, B., Chen, C. P., Lu, M., Stein, A., Bakhru, H., Grote, R. R., Bergman, K., Green, W. M. J., & Osgood, R. M. (2016). Ar+-Implanted Si-Waveguide Photodiodes for Mid-Infrared Detection. Photonics, 3(3), 46. https://doi.org/10.3390/photonics3030046