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Journal: Processes, 2021
Volume: 9
Number: 2246
2246
Article: Adsorption and Reaction Mechanisms of Direct Palladium Synthesis by ALD Using Pd(hfac)₂ and Ozone on Si (100) Surface
Authors: by Chunyu Cheng, Yiming Zou, Jiahui Li, Amanda Jiamin Ong, Ronn Goei, Jingfeng Huang, Shuzhou Li and Alfred Iing Yoong Tok
Link: https://www.mdpi.com/2227-9717/9/12/2246

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