Cheng, C.; Zou, Y.; Li, J.; Ong, A.J.; Goei, R.; Huang, J.; Li, S.; Tok, A.I.Y.
Adsorption and Reaction Mechanisms of Direct Palladium Synthesis by ALD Using Pd(hfac)2 and Ozone on Si (100) Surface. Processes 2021, 9, 2246.
https://doi.org/10.3390/pr9122246
AMA Style
Cheng C, Zou Y, Li J, Ong AJ, Goei R, Huang J, Li S, Tok AIY.
Adsorption and Reaction Mechanisms of Direct Palladium Synthesis by ALD Using Pd(hfac)2 and Ozone on Si (100) Surface. Processes. 2021; 9(12):2246.
https://doi.org/10.3390/pr9122246
Chicago/Turabian Style
Cheng, Chunyu, Yiming Zou, Jiahui Li, Amanda Jiamin Ong, Ronn Goei, Jingfeng Huang, Shuzhou Li, and Alfred Iing Yoong Tok.
2021. "Adsorption and Reaction Mechanisms of Direct Palladium Synthesis by ALD Using Pd(hfac)2 and Ozone on Si (100) Surface" Processes 9, no. 12: 2246.
https://doi.org/10.3390/pr9122246
APA Style
Cheng, C., Zou, Y., Li, J., Ong, A. J., Goei, R., Huang, J., Li, S., & Tok, A. I. Y.
(2021). Adsorption and Reaction Mechanisms of Direct Palladium Synthesis by ALD Using Pd(hfac)2 and Ozone on Si (100) Surface. Processes, 9(12), 2246.
https://doi.org/10.3390/pr9122246