Consequence Assessment of a 440 L Propylene Y-Cylinder Gas Cabinet in Semiconductor Gas Supply Systems
Abstract
1. Introduction
2. Methods
2.1. Target Facility and Operational Conditions
2.2. Leak Scenario and Source Term Modeling
2.3. CFD Simulation and Grid Configuration
2.4. Rationale for Explosion Consequence Assessment Methods
2.5. Pressure Vessel Burst (PVB) Overpressure Calculation Method
2.6. BLEVE Fireball Thermal Radiation Calculation Method
2.7. Vapor Cloud Explosion (VCE) Calculation Method
3. Results
3.1. Fluid Motion and Gas Dispersion Analysis
| Case | Cells (Million) | Discretization | Turbulence Model | Flammable Cloud Volume (m3) | Max. In-Cabinet Mole Fraction (–) | Exhaust Flow Rate (CMM) |
|---|---|---|---|---|---|---|
| Coarse mesh | 1.66 | 1st-order upwind | Standard k–ε | 7.84 (+13.6%) | 0.862 (+14.0%) | 35.2 (−16.3%) |
| Medium mesh (baseline) | 3.39 | 1st-order upwind | Standard k–ε | 6.90 | 0.756 | 42 |
| Fine mesh | 7.89 | 1st-order upwind | Standard k–ε | 6.66 (−3.5%) | 0.742 (−1.9%) | 44.5 (+5.9%) |
| Medium mesh, 2nd-order | 3.39 | 2nd-order upwind | Standard k–ε | 7.00 (+1.4%) | 0.779 (+3.0%) | 44.2 (+5.2%) |
| Medium mesh, RNG k–ε | 3.39 | 1st-order upwind | RNG k–ε | 7.20 (+4.3%) | 0.771 (+2.0%) | 43.9 (+4.6%) |
3.2. Quantitative Explosion Consequence Assessment
3.2.1. Pressure Vessel Burst (PVB) Overpressure Analysis

3.2.2. BLEVE Fireball Thermal Radiation Analysis
3.2.3. Vapor Cloud Explosion (VCE) Analysis
| Case | Effective Volume (V) | Explosion Efficiency (η) | TNT Equivalent Mass (M) | 1 psi Distance (R) |
|---|---|---|---|---|
| Case based on CFD-derived flammable cloud only | 6.9 m3 | 0.1 | 0.65 kg | 10.4 m |
| Concentration-based case (LFL–UFL mixture only; upper bound) | ≤6.9 m3 | 0.1 | ≤0.65 kg | ≤10.4 m |
| Cabinet geometric volume only | 8.43 m3 | 0.1 | 0.79 kg | 11.1 m |
| Adopted (cabinet + cloud) | 15.3 m3 | 0.1 | 1.43 kg | 13.6 m |
| Low-sensitivity efficiency case | 15.3 m3 | 0.05 | 0.72 kg | 10.8 m |
| High-sensitivity efficiency case | 15.3 m3 | 0.20 | 2.86 kg | 17.1 m |
3.3. Summary of Explosion Consequence Results
4. Discussion
5. Conclusions
- CFD simulations showed that, under the simulated steady-state conditions, emergency ventilation effectively limited the dispersion of leaked propylene. The flammable vapor cloud exceeding the lower flammability limit (LFL) occupied 6.9 m3, representing less than 0.2% of the total BSGS room volume. Under the simulated conditions, the hazardous region remained confined to the area surrounding the gas cabinet.
- The predicted overpressure distances corresponding to the 1 psi criterion were 12.0 m for the PVB and 13.6 m for the vapor cloud explosion. In contrast, the BLEVE fireball produced a substantially larger thermal radiation hazard, with an upper-bound impact radius of 104 m under the assumed 100% inventory participation scenario, based on the 5 kW/m2 criterion. Among the investigated consequence metrics, the BLEVE fireball therefore produced the largest calculated hazard distance; this value is an upper bound only with respect to the assumed participation fraction (67–104 m for 25–100% participation, Table 6) and should not be interpreted as an expected accident distance.
- Increasing cylinder capacity increases the potential consequences of a single accident because of the larger gas inventory. However, the longer replacement interval substantially reduces the frequency of manual cylinder handling, which is a recognized source of gas leak incidents in semiconductor facilities. The present consequence assessment does not establish how the overall risk changes relative to the conventional 47 L system; such a comparison would require accident-frequency data in addition to consequence analysis.
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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| Parameter | Value/Specification |
|---|---|
| Cabinet Size | 1600 (W) × 2986 (D) × 1764 (H) mm |
| Vent Pressure | Normal: −120 Pa/Emergency: −200 Pa (applied; actual facility emergency operating condition) |
| Cylinder Capacity | 440 L |
| Process Parameter | Value/Specification |
|---|---|
| Target Gas | Propylene (C3H6) |
| Total Mass | 185 kg |
| Leak Pressure | 10.6 bar (abs.) |
| Hole Size (Orifice Diameter) | 12.7 mm |
| Discharge Coefficient (Cd) | 1.0 |
| Parameter | Value Used | Basis | Type |
|---|---|---|---|
| Leak orifice diameter | 12.7 mm (1/2-inch tube ID) | Matches the 1/2-inch tube fitting at the cylinder outlet connection; full-bore (guillotine) rupture of this line, per TNO Yellow Book worst-case screening approach | Conservative |
| Discharge coefficient (Cd) | 1.0 | TNO Yellow Book recommendation for maximum release rate | Conservative |
| Vessel pressure, leak scenario | 10.6 bar (abs.) | Saturated vapor pressure of propylene at 25 °C | Credible (operating) |
| Emergency ventilation pressure (CFD b.c.) | −200 Pa | Emergency-mode exhaust pressure applied as the CFD boundary condition in this study, matching the facility’s actual emergency operating condition | Credible (as-built) |
| Mass release rate to CFD | 1.48 kg/s | PHAST predicts a two-phase release of 4.36 kg/s, of which ~34% flashes to vapor (1.48 kg/s); this vapor rate was applied as a constant CFD source, deliberately excluding the release-rate decay over time | Conservative (steady-state, no decay) |
| Vessel burst pressure, PVB (Equation (4)) | 10.6 bar (abs.) | Same operating condition as the leak scenario (10.6 bar abs.; P1 = 1,060,000 Pa substituted into Equation (4)); the vessel is assumed to burst at its operating pressure | Credible (operating) |
| BLEVE fireball fuel participation | 100% of 185 kg | Upper-bound screening scenario: entire vessel inventory participates in fireball | Conservative |
| VCE explosion efficiency (η) | 10% (0.1) | Value from chemical process explosion-evaluation guidelines; sensitivity to both η and V given in Section 3.2.3 (R = 10.4–17.1 m) | Conservative |
| VCE effective explosion volume | 15.3 m3 (8.43 + 6.9) | Full cabinet volume conservatively treated as reactive, added to CFD cloud volume; sensitivity to this assumption given in Section 3.2.3 | Conservative |
| Setting | Value/Specification |
|---|---|
| Solver | Pressure-based, steady-state; 25,000 iterations |
| Turbulence model | Standard k–ε with standard wall functions |
| Pressure–velocity coupling | SIMPLE |
| Spatial discretization | Pressure: Standard; momentum, species, k, ε: first-order upwind |
| Convergence criteria (scaled residuals) | 10−3 (continuity, momentum, k, ε, species); 10−6 (energy) |
| Density/species diffusion | Ideal gas; kinetic theory, turbulent Schmidt number 0.7 |
| Material properties | Propylene and air from the Fluent material database |
| Leak source | Mass-flow inlet, 1.48 kg/s at 300 K; cylinder top valve, vertically upward; turbulence intensity 10%, hydraulic diameter 12.7 mm |
| Supply grilles | 150 openings (12 mm × 110 mm, total open area ≈ 0.198 m2), represented as a single lumped inlet surface; turbulence intensity 10%, hydraulic diameter 0.5 m (based on the lumped inlet surface) |
| Cabinet exhaust | Pressure outlet, −200 Pa (emergency mode); four 6-inch ducts discharging outside the computational domain |
| BSGS room ventilation | 8000 CMH (four units × 2000 CMH) |
| Walls | Adiabatic, no-slip, standard wall function |
| Ambient conditions | 25 °C, 101,325 Pa; gravity included |
| Mesh | Unstructured tetrahedral; 3.39 M cells (room), 2.76 M cells (cabinet); minimum cell 0.7 mm at leak; max. skewness 0.841, min. orthogonal quality 0.208 |
| Parameter | 25% | 50% | 75% | 100% (Base Case) |
|---|---|---|---|---|
| Duration of the fireball (s) | 2.54 | 2.96 | 3.25 | 3.48 |
| Maximum diameter of the fireball (m) | 23.1 | 28.3 | 32.1 | 35.1 |
| Surface emissive power, clear flame (kW/m2) | 244.2 | 256.8 | 265.0 | 271.1 |
| Distance to 5 kW/m2 (m) | 67 | 83 | 94 | 104 |
| Explosion Scenario Type | Damage Threshold Criterion | Maximum Consequence Impact Distance |
|---|---|---|
| Pressure Vessel Burst (PVB) | Overpressure: 1 psi (7 kPa) | 12.0 m |
| VCE (Vapor Cloud Explosion) | Overpressure: 1 psi (7 kPa) | 13.6 m |
| BLEVE fireball | Thermal Radiation: 5 kW/m2 | 104.0 m |
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Kim, D.; Kwon, H.-H.; Sohn, D.-y.; Lee, S.-Y.; Jung, S. Consequence Assessment of a 440 L Propylene Y-Cylinder Gas Cabinet in Semiconductor Gas Supply Systems. Processes 2026, 14, 3223. https://doi.org/10.3390/pr14203223
Kim D, Kwon H-H, Sohn D-y, Lee S-Y, Jung S. Consequence Assessment of a 440 L Propylene Y-Cylinder Gas Cabinet in Semiconductor Gas Supply Systems. Processes. 2026; 14(20):3223. https://doi.org/10.3390/pr14203223
Chicago/Turabian StyleKim, Dahee, Hyuk-Hwa Kwon, Deok-young Sohn, Seok-Yong Lee, and Seungho Jung. 2026. "Consequence Assessment of a 440 L Propylene Y-Cylinder Gas Cabinet in Semiconductor Gas Supply Systems" Processes 14, no. 20: 3223. https://doi.org/10.3390/pr14203223
APA StyleKim, D., Kwon, H.-H., Sohn, D.-y., Lee, S.-Y., & Jung, S. (2026). Consequence Assessment of a 440 L Propylene Y-Cylinder Gas Cabinet in Semiconductor Gas Supply Systems. Processes, 14(20), 3223. https://doi.org/10.3390/pr14203223

