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Chemosensors 2018, 6(2), 22;

Miniaturized Single Chip Arrangement of a Wheatstone Bridge Based Calorimetric Gas Sensor

Institute for Sensor and Information Systems (ISIS), Karlsruhe University of Applied Sciences, D-76133 Karlsruhe, Germany
Author to whom correspondence should be addressed.
Received: 2 April 2018 / Revised: 14 May 2018 / Accepted: 16 May 2018 / Published: 19 May 2018
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The design and fabrication of a miniaturized calorimetric-type gas sensor in a single chip arrangement is presented. Active and passive thin-film Pt meanders are integrated in a single platform (7 × 7 mm2) together with a temperature sensor and a thin-film microheater at the reverse side. Active meanders are covered by a porous Al2O3/2 wt % Pt thick-film layer. The selection of substrate, position of meanders, and active catalysts (especially their concentration) play a crucial role in directing sensor performance. The presented results show that the sensor signal (Wheatstone bridge voltage) is generated by diffusion-limited exothermic reactions which point towards catalytically enhanced combustion reactions mainly inside the active porous layer. By extrapolation of the linear sensitivity curves, the sensitivity limit was estimated to be 4 ppm for propene and to be 18 ppm for CO. In general, the one-chip-sensing concept has high potential to be used as a gas sensor for analysis of combustible gases; however, further optimization of the meander design and the catalyst material as well as investigations of the sensing behavior under varying ambient temperatures are necessary before such applications shall be considered. View Full-Text
Keywords: calorimetric gas sensor; single chip arrangement; LTCC; catalytic activity calorimetric gas sensor; single chip arrangement; LTCC; catalytic activity

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Illyaskutty, N.; Kansizoglu, O.; Akdag, O.; Ojha, B.; Knoblauch, J.; Kohler, H. Miniaturized Single Chip Arrangement of a Wheatstone Bridge Based Calorimetric Gas Sensor. Chemosensors 2018, 6, 22.

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