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Journal: Electronics, 2023
Volume: 12
Number: 4960
Article:
Design and Analysis of a Long-Stroke and High-Precision Positioning System for Scanning Beam Interference Lithography
Authors:
by
Hao Chen, Longxiang Li, Ruigang Li, Guangdong Yu and Qi Chen
Link:
https://www.mdpi.com/2079-9292/12/24/4960
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