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Journal: Electronics, 2023
Volume: 12
Number: 2157
Article:
An Asymmetric Velocity Profile for Minimizing Wafer Slippage and Settling Time of a Wafer Transport Robot
Authors:
by
Kwan Sik Yoon, Min Seok Kim, Hyungpil Moon, Hyuok Ryeol Choi and Ja Choon Koo
Link:
https://www.mdpi.com/2079-9292/12/10/2157
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