Order Article Reprints

Li P, Wei S, Kang X, Zheng Y, Zhang J, Wu H, Wei K, Yan J, Liu X. Optimization of Oxygen Plasma Treatment on Ohmic Contact for AlGaN/GaN HEMTs on High-Resistivity Si Substrate. Electronics. 2021; 10(7):855. https://doi.org/10.3390/electronics10070855

Li, Pengfei, Shuhua Wei, Xuanwu Kang, Yingkui Zheng, Jing Zhang, Hao Wu, Ke Wei, Jiang Yan, and Xinyu Liu. 2021. "Optimization of Oxygen Plasma Treatment on Ohmic Contact for AlGaN/GaN HEMTs on High-Resistivity Si Substrate" Electronics 10, no. 7: 855. https://doi.org/10.3390/electronics10070855

Li, P., Wei, S., Kang, X., Zheng, Y., Zhang, J., Wu, H., Wei, K., Yan, J., & Liu, X. (2021). Optimization of Oxygen Plasma Treatment on Ohmic Contact for AlGaN/GaN HEMTs on High-Resistivity Si Substrate. Electronics, 10(7), 855. https://doi.org/10.3390/electronics10070855