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Journal: Electronics, 2021
Volume: 10
Number: 2944

Article: Fabrication of Superconducting Nb–AlN–NbN Tunnel Junctions Using Electron-Beam Lithography
Authors: by Mikhail Yu. Fominsky, Lyudmila V. Filippenko, Artem M. Chekushkin, Pavel N. Dmitriev and Valery P. Koshelets
Link: https://www.mdpi.com/2079-9292/10/23/2944

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