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Journal: Electronics, 2021
Volume: 10
Number: 2944
Article:
Fabrication of Superconducting Nb–AlN–NbN Tunnel Junctions Using Electron-Beam Lithography
Authors:
by
Mikhail Yu. Fominsky, Lyudmila V. Filippenko, Artem M. Chekushkin, Pavel N. Dmitriev and Valery P. Koshelets
Link:
https://www.mdpi.com/2079-9292/10/23/2944
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