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Journal: Electronics, 2021
Volume: 10
Number: 2199
Article:
Effects of Chamber Pressures on the Passivation Layer of Hydrogenated Nano-Crystalline Silicon Mixed-Phase Thin Film by Using Microwave Annealing
Authors:
by
Jia-Hao Lin, Hung-Wei Wu, Wei-Chen Tien, Cheng-Yuan Hung and Shih-Kun Liu
Link:
https://www.mdpi.com/2079-9292/10/18/2199
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