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TiO2 Nano Flowers Based EGFET Sensor for pH Sensing

Green Energy Technology Research Center, Kun Shan University, Tainan 710, Taiwan
Department of Electrical Engineering, Institute of Microelectronics, National Cheng Kung University, Tainan 701, Taiwan
Department of Electrical Engineering, Kun Shan University, Tainan 710, Taiwan
Authors to whom correspondence should be addressed.
Coatings 2019, 9(4), 251;
Received: 19 March 2019 / Revised: 11 April 2019 / Accepted: 11 April 2019 / Published: 15 April 2019
(This article belongs to the Special Issue Advances in Thin Film Transistors: Properties and Applications)
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In this study, pH sensors were successfully fabricated on a fluorine-doped tin oxide substrate and grown via hydrothermal methods for 8 h for pH sensing characteristics. The morphology was obtained by high-resolution scanning electron microscopy and showed randomly oriented flower-like nanostructures. The TiO2 nanoflower pH sensors were measured over a pH range of 2–12. Results showed a high sensitivity of the TiO2 nano-flowers pH sensor, 2.7 (μA)1/2/pH, and a linear relationship between IDS and pH (regression of 0.9991). The relationship between voltage reference and pH displayed a sensitivity of a 46 mV/pH and a linear regression of 0.9989. The experimental result indicated that a flower-like TiO2 nanostructure extended gate field effect transistor (EGFET) pH sensor effectively detected the pH value. View Full-Text
Keywords: EGFET; TiO2; hydrothermal synthesis EGFET; TiO2; hydrothermal synthesis

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Yang, C.-C.; Chen, K.-Y.; Su, Y.-K. TiO2 Nano Flowers Based EGFET Sensor for pH Sensing. Coatings 2019, 9, 251.

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